A nanopositioning device can move an object in one, two, three, or more dimensions. A typical range in each dimension is 10um to 200um with a resolution of 1nm, or 5 atoms of Carbon. Nanopositioning devices are widely applied in microscopy, optics, semiconductor manufacturing and life sciences. This project is developing new nanopositioning devices, sensors, amplifiers, and control systems to increase the bandwidth and precision of piezoelectric nanopositioning stages.
Books
LiMin Zhu; Y. K. Yong; Y. Tian; Y. Liu (Ed.)
Actuating, Sensing, Control, and Instrumentation for Ultra Precision Engineering Book
2024, ISBN: 978-3-0365-9526-9.
@book{Zhu2024,
title = {Actuating, Sensing, Control, and Instrumentation for Ultra Precision Engineering},
editor = {LiMin Zhu and Y. K. Yong and Y. Tian and Y. Liu},
url = {https://mdpi-res.com/bookfiles/book/8747/Actuating_Sensing_Control_and_Instrumentation_for_Ultra_Precision_Engineering.pdf?v=1711452780},
doi = {https://doi.org/10.3390/books978-3-0365-9527-6},
isbn = {978-3-0365-9526-9},
year = {2024},
date = {2024-02-01},
urldate = {2024-02-01},
abstract = {Ultra-Precision Engineering (UPE) is a comprehensive field that concerns the design, manufacture and measurement of ultra-precision components and systems. With the progress of new solutions to UPE, the demand of advanced mechatronic systems with high-performance on freedom, stroke, resolution, accuracy and bandwidth has been continuously increasing. This Special Issue is a collection of 13 excellent research papers published in Actuators, showcasing and discussing new advances in actuators and mechatronic systems for UPE as well as ultra-precision machines.},
keywords = {},
pubstate = {published},
tppubtype = {book}
}
Ultra-Precision Engineering (UPE) is a comprehensive field that concerns the design, manufacture and measurement of ultra-precision components and systems. With the progress of new solutions to UPE, the demand of advanced mechatronic systems with high-performance on freedom, stroke, resolution, accuracy and bandwidth has been continuously increasing. This Special Issue is a collection of 13 excellent research papers published in Actuators, showcasing and discussing new advances in actuators and mechatronic systems for UPE as well as ultra-precision machines.
A. J. Fleming; K. K. Leang
Design, Modeling and Control of Nanopositioning Systems Book
Springer, London, UK, 2014, ISBN: 978-3319066165.
@book{B14,
title = {Design, Modeling and Control of Nanopositioning Systems},
author = {A. J. Fleming and K. K. Leang},
url = {http://www.amazon.com/Modeling-Control-Nanopositioning-Advances-Industrial/dp/3319066161 },
isbn = {978-3319066165},
year = {2014},
date = {2014-12-30},
publisher = {Springer},
address = {London, UK},
abstract = {Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control.
Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging.
Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.},
keywords = {},
pubstate = {published},
tppubtype = {book}
}
Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control.
Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging.
Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.
Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging.
Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.
Book Chapters
A. J. Fleming; K. K. Leang
Position Sensors for Nanopositioning Book Chapter
In: Ru, C.; Liu, X.; Sun, Y. (Ed.): Springer, 2016, ISBN: 978-3-319-23853-1.
@inbook{B15a,
title = {Position Sensors for Nanopositioning},
author = {A. J. Fleming and K. K. Leang},
editor = {C. Ru and X. Liu and Y. Sun},
isbn = {978-3-319-23853-1},
year = {2016},
date = {2016-02-01},
publisher = {Springer},
abstract = {Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including non-linearity, drift and noise. The second goal is to review current position sensor technologies and to compare their performance. The sensors considered include: resistive, piezoelectric and piezoresistive strain sensors; capacitive sensors; electrothermal sensors; eddy current sensors; linear variable displacement transformers; interferometers; and linear encoders.},
keywords = {},
pubstate = {published},
tppubtype = {inbook}
}
Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including non-linearity, drift and noise. The second goal is to review current position sensor technologies and to compare their performance. The sensors considered include: resistive, piezoelectric and piezoresistive strain sensors; capacitive sensors; electrothermal sensors; eddy current sensors; linear variable displacement transformers; interferometers; and linear encoders.
K. K. Leang; A. J. Fleming
Tracking Control for Nanopositioning Systems Book Chapter
In: Ru, C.; Liu, X.; Sun, Y. (Ed.): Springer, 2016, ISBN: 978-3-319-23853-1.
@inbook{B15b,
title = {Tracking Control for Nanopositioning Systems},
author = {K. K. Leang and A. J. Fleming},
editor = {C. Ru and X. Liu and Y. Sun},
isbn = {978-3-319-23853-1},
year = {2016},
date = {2016-02-01},
publisher = {Springer},
abstract = {The performance of nanopositioning systems is greatly affected by their mechanical dynamics, and for piezo-actuated designs, induced structural vibration, hysteresis, and creep can drastically limit positioning precision. Therefore, tracking control, both feedback and feedforward control, plays an important role in achieving high-performance operation, especially at high operating frequencies. This chapter reviews popular feedback and feedforward control techniques for nanopositioning systems. First, the effects of vibration, hysteresis, and creep are described, where simple methods traditionally employed to avoid these effects are discussed. Second, various models for nanopositioning systems for control system design, simulation, and synthesis are presented. Finally, popular feedback and feedforward controllers to handle vibration, hysteresis, and creep are presented, along with experimental results.},
keywords = {},
pubstate = {published},
tppubtype = {inbook}
}
The performance of nanopositioning systems is greatly affected by their mechanical dynamics, and for piezo-actuated designs, induced structural vibration, hysteresis, and creep can drastically limit positioning precision. Therefore, tracking control, both feedback and feedforward control, plays an important role in achieving high-performance operation, especially at high operating frequencies. This chapter reviews popular feedback and feedforward control techniques for nanopositioning systems. First, the effects of vibration, hysteresis, and creep are described, where simple methods traditionally employed to avoid these effects are discussed. Second, various models for nanopositioning systems for control system design, simulation, and synthesis are presented. Finally, popular feedback and feedforward controllers to handle vibration, hysteresis, and creep are presented, along with experimental results.
Y. K. Yong; K. K. Leang
Mechanical Design of High-Speed Nanopositioning Systems Book Chapter
In: Ru, C.; Liu, X.; Sun, Y. (Ed.): Chapter 3, Springer, 2016.
@inbook{Yong2016,
title = {Mechanical Design of High-Speed Nanopositioning Systems},
author = {Y. K. Yong and K. K. Leang},
editor = {C. Ru and X. Liu and Y. Sun},
year = {2016},
date = {2016-02-01},
publisher = {Springer},
chapter = {3},
keywords = {},
pubstate = {published},
tppubtype = {inbook}
}
A. Bazaei; Y. K. Yong; S. O. R. Moheimani; A. Sebastian
High-Speed, Ultra-high-precision Nanopositioning: A Signal Transformation Approach Book Chapter
In: Eleftheriou, E.; Moheimani, S. O. R. (Ed.): vol. 413, Chapter 3, pp. 47-65, Springer, 2011.
@inbook{Bazaei2011,
title = {High-Speed, Ultra-high-precision Nanopositioning: A Signal Transformation Approach},
author = {A. Bazaei and Y. K. Yong and S. O. R. Moheimani and A. Sebastian},
editor = {E. Eleftheriou and S. O. R. Moheimani},
url = {http://www.eng.newcastle.edu.au/%7Eyy582/Papers/Bazaei-High-speed-signal-transformation-approach.pdf},
year = {2011},
date = {2011-03-01},
volume = {413},
pages = {47-65},
publisher = {Springer},
chapter = {3},
series = {Lecture Notes in Control and Information Sciences},
keywords = {},
pubstate = {published},
tppubtype = {inbook}
}
Journal Articles
M. Omidbeike; S. I. Moore; Y. K. Yong; A. J. Fleming
Five-Axis Bimorph Monolithic Nanopositioning Stage: Design, Modeling, and Characterization Journal Article
In: Sensors and Actuators A: Physical, vol. 332, iss. 1, 2021, ISSN: 0924-4247.
@article{Omidbeike2021,
title = {Five-Axis Bimorph Monolithic Nanopositioning Stage: Design, Modeling, and Characterization},
author = {M. Omidbeike and S. I. Moore and Y. K. Yong and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2022/03/J21g.pdf},
doi = {10.1016/j.sna.2021.113125},
issn = {0924-4247},
year = {2021},
date = {2021-09-16},
urldate = {2021-09-16},
journal = {Sensors and Actuators A: Physical},
volume = {332},
issue = {1},
abstract = {The article describes the design and modeling of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. Six-axis motion is also possible but requires 16 amplifier channels rather than 8. The nanopositioner is ultra low profile with a thickness of 1 mm. Analytical modeling and finite-element-analysis accurately predict the experimental performance. The stage was conservatively driven with 33% of the maximum voltage, which resulted in an X and Y travel range of 6.22 μm and 5.27 μm respectively; a Z travel range of 26.5 μm; and a rotational motion of 600 μrad and 884 μrad about the X and Y axis respectively. The first resonance frequency occurs at 883 Hz in the Z axis. Experimental atomic force microscopy is performed using the proposed device as a sample scanner.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
The article describes the design and modeling of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. Six-axis motion is also possible but requires 16 amplifier channels rather than 8. The nanopositioner is ultra low profile with a thickness of 1 mm. Analytical modeling and finite-element-analysis accurately predict the experimental performance. The stage was conservatively driven with 33% of the maximum voltage, which resulted in an X and Y travel range of 6.22 μm and 5.27 μm respectively; a Z travel range of 26.5 μm; and a rotational motion of 600 μrad and 884 μrad about the X and Y axis respectively. The first resonance frequency occurs at 883 Hz in the Z axis. Experimental atomic force microscopy is performed using the proposed device as a sample scanner.
R. Seethaler; S. Z. Mansour; M. G. Ruppert; A. J. Fleming
Position and force sensing using strain gauges integrated into piezoelectric bender electrodes Journal Article
In: Sensors and Actuators A: Physical, vol. 321, pp. 112416, 2021, ISBN: 0924-4247.
@article{J21e,
title = {Position and force sensing using strain gauges integrated into piezoelectric bender electrodes},
author = {R. Seethaler and S. Z. Mansour and M. G. Ruppert and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2022/03/J21e-1.pdf},
doi = {10.1016/j.sna.2020.112416},
isbn = {0924-4247},
year = {2021},
date = {2021-04-15},
urldate = {2020-12-30},
journal = {Sensors and Actuators A: Physical},
volume = {321},
pages = {112416},
abstract = {This article derives design guidelines for integrating strain gauges into the electrodes of piezoelectric bending actuators. The proposed sensor can estimate the actuator tip displacement in response to an applied voltage and an external applied tip force. The actuator load force is also estimated with an accuracy of 8% full scale by approximating the actuator response with a linear model. The applications of this work include micro-grippers and pneumatic valves, which both require the measurement of deflection and load force. At present, this is achieved by external sensors. However, this work shows that these functions can be integrated into the actuator electrodes.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
This article derives design guidelines for integrating strain gauges into the electrodes of piezoelectric bending actuators. The proposed sensor can estimate the actuator tip displacement in response to an applied voltage and an external applied tip force. The actuator load force is also estimated with an accuracy of 8% full scale by approximating the actuator response with a linear model. The applications of this work include micro-grippers and pneumatic valves, which both require the measurement of deflection and load force. At present, this is achieved by external sensors. However, this work shows that these functions can be integrated into the actuator electrodes.
S. I. Moore; Y. K. Yong; M. Omidbeike; A. J. Fleming
Serial-kinematic monolithic nanopositioner with in-plane bender actuators Journal Article
In: Mechatronics, vol. 75, no. 102541, 2021, ISBN: 0957-4158.
@article{Moore2021,
title = {Serial-kinematic monolithic nanopositioner with in-plane bender actuators},
author = {S. I. Moore and Y. K. Yong and M. Omidbeike and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/03/J21c.pdf},
doi = {https://doi.org/10.1016/j.mechatronics.2021.102541},
isbn = {0957-4158},
year = {2021},
date = {2021-03-23},
journal = {Mechatronics},
volume = {75},
number = {102541},
abstract = {This article describes a monolithic nanopositioner constructed from in-plane bending actuators which provide greater deflection than previously reported extension actuators, at the expense of stiffness and resonance frequency. The proposed actuators are demonstrated by constructing an XY nanopositioning stage with a serial kinematic design. Analytical modeling and finite-element-analysis accurately predicts the experimental performance of the nanopositioner. A 10μm range is achieved in the X and Y axes with an applied voltage of +/-200 V. The first resonance mode occurs at 250 Hz in the Z axis. The stage is demonstrated for atomic force microscopy imaging.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
This article describes a monolithic nanopositioner constructed from in-plane bending actuators which provide greater deflection than previously reported extension actuators, at the expense of stiffness and resonance frequency. The proposed actuators are demonstrated by constructing an XY nanopositioning stage with a serial kinematic design. Analytical modeling and finite-element-analysis accurately predicts the experimental performance of the nanopositioner. A 10μm range is achieved in the X and Y axes with an applied voltage of +/-200 V. The first resonance mode occurs at 250 Hz in the Z axis. The stage is demonstrated for atomic force microscopy imaging.
D. S. Raghunvanshi; S. I. Moore; A. J. Fleming; Y. K. Yong
Electrode Configurations for Piezoelectric Tube Actuators With Improved Scan Range and Reduced Cross-Coupling Journal Article
In: IEEE/ASME Transactions on Mechatronics, vol. 25, no. 3, pp. 1479-1486, 2020, ISSN: 00346748.
@article{J20d,
title = {Electrode Configurations for Piezoelectric Tube Actuators With Improved Scan Range and Reduced Cross-Coupling},
author = {D. S. Raghunvanshi and S. I. Moore and A. J. Fleming and Y. K. Yong},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2020/09/J20d.pdf},
doi = {10.1109/TMECH.2020.2978241},
issn = {00346748},
year = {2020},
date = {2020-06-01},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {25},
number = {3},
pages = {1479-1486},
abstract = {Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the high-pass response of the piezo and interface electronics. This article describes a simplified method for low-frequency correction that uses the piezoelectric sensor as an electrical component in a filter circuit. The resulting response is first-order, rather than second-order, with a cut-off frequency equal to that of a buffer circuit with the same input resistance. The proposed method is demonstrated to allow simultaneous damping and tracking control of a high-speed vertical nanopositioning stage.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the high-pass response of the piezo and interface electronics. This article describes a simplified method for low-frequency correction that uses the piezoelectric sensor as an electrical component in a filter circuit. The resulting response is first-order, rather than second-order, with a cut-off frequency equal to that of a buffer circuit with the same input resistance. The proposed method is demonstrated to allow simultaneous damping and tracking control of a high-speed vertical nanopositioning stage.
R. Rozario; A. J. Fleming; T. Oomen
Finite-Time Learning Control Using Frequency Response Data with Application to a Nanopositioning Stage Journal Article
In: IEEE/ASME Transactions on Mechatronics, vol. 24, no. 5, pp. 2085-2096, 2020, ISSN: 10834435.
@article{J20a,
title = {Finite-Time Learning Control Using Frequency Response Data with Application to a Nanopositioning Stage},
author = {R. Rozario and A. J. Fleming and T. Oomen},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2020/09/J20a-1.pdf},
doi = {10.1109/TMECH.2019.2931407},
issn = {10834435},
year = {2020},
date = {2020-01-01},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {24},
number = {5},
pages = {2085-2096},
abstract = {Learning control enables significant performance improvement for systems that perform repeating tasks. Achieving high tracking performance by utilizing past error data typically requires noncausal learning that is based on a parametric model of the process. Such model-based approaches impose significant requirements on modeling and filter design. This paper aims to reduce these requirements by developing a learning control framework that enables performance improvement through noncausal learning without relying on a parametric model. This is achieved by explicitly using the discrete Fourier transform to enable learning by using a nonparametric frequency response function model of the process. The effectiveness of the developed method is illustrated by application to a nanopositioning stage},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Learning control enables significant performance improvement for systems that perform repeating tasks. Achieving high tracking performance by utilizing past error data typically requires noncausal learning that is based on a parametric model of the process. Such model-based approaches impose significant requirements on modeling and filter design. This paper aims to reduce these requirements by developing a learning control framework that enables performance improvement through noncausal learning without relying on a parametric model. This is achieved by explicitly using the discrete Fourier transform to enable learning by using a nonparametric frequency response function model of the process. The effectiveness of the developed method is illustrated by application to a nanopositioning stage
K. Wang; M. G. Ruppert; C. Manzie; D. Nesic; Y. K. Yong
Scan Rate Adaptation for AFM Imaging Based on Performance Metric Optimisation Journal Article
In: IEEE/ASME Transactions on Mechatronics, 2019, (early access).
@article{Wang2019b,
title = {Scan Rate Adaptation for AFM Imaging Based on Performance Metric Optimisation},
author = {K. Wang and M. G. Ruppert and C. Manzie and D. Nesic and Y. K. Yong },
url = {https://ieeexplore.ieee.org/document/8867937},
doi = {10.1109/TMECH.2019.2947203},
year = {2019},
date = {2019-10-14},
journal = { IEEE/ASME Transactions on Mechatronics},
abstract = {Constant-force contact-mode atomic force microscopy (AFM) relies on a feedback control system to regulate the tip-sample interaction during imaging. Due to limitations in actuators and control, the bandwidth of the regulation system is typically small. Therefore, the scan rate is usually limited in order to guarantee a desirable image quality for a constant-rate scan. By adapting the scan rate online, further performance improvement is possible, and the conditions to this improvement has been explored qualitatively in a previous study for a wide class of possible scan patterns. In this paper, a quantitative assessment of the previously proposed adaptive scan scheme is investigated through experiments that explore the impact of various degrees of freedom in the algorithm. Further modifications to the existing scheme are proposed and shown to improve the closed-loop performance. The flexibility of the proposed approach is further demonstrated by applying the algorithm to tapping-mode AFM.},
note = {early access},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Constant-force contact-mode atomic force microscopy (AFM) relies on a feedback control system to regulate the tip-sample interaction during imaging. Due to limitations in actuators and control, the bandwidth of the regulation system is typically small. Therefore, the scan rate is usually limited in order to guarantee a desirable image quality for a constant-rate scan. By adapting the scan rate online, further performance improvement is possible, and the conditions to this improvement has been explored qualitatively in a previous study for a wide class of possible scan patterns. In this paper, a quantitative assessment of the previously proposed adaptive scan scheme is investigated through experiments that explore the impact of various degrees of freedom in the algorithm. Further modifications to the existing scheme are proposed and shown to improve the closed-loop performance. The flexibility of the proposed approach is further demonstrated by applying the algorithm to tapping-mode AFM.
S. I. Moore; A. J. Fleming; Y. K. Yong
Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning Journal Article
In: IEEE Sensor Letters, vol. 3, no. 8, pp. 2501503, 2019, ISBN: 2475-1472.
@article{Moore2019,
title = {Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning},
author = {S. I. Moore and A. J. Fleming and Y. K. Yong},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2019/10/J19c.pdf},
doi = {10.1109/LSENS.2019.2933065},
isbn = {2475-1472},
year = {2019},
date = {2019-09-09},
journal = {IEEE Sensor Letters},
volume = {3},
number = {8},
pages = {2501503},
abstract = {Precision capacitive sensing methods encode the measurement in a high frequency signal, which requires demodulation. To extract the measurement, the signal is observed over many cycles limiting the bandwidth of the sensor and introducing an undesirable phase lag. To address this limitation, this article outlines a design, which fuses the output of a standard modulated capacitive sensor and a charge amplifier, providing an instantaneous capacitive measurement whose bandwidth is only limited by the speed at which the electronics operate.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Precision capacitive sensing methods encode the measurement in a high frequency signal, which requires demodulation. To extract the measurement, the signal is observed over many cycles limiting the bandwidth of the sensor and introducing an undesirable phase lag. To address this limitation, this article outlines a design, which fuses the output of a standard modulated capacitive sensor and a charge amplifier, providing an instantaneous capacitive measurement whose bandwidth is only limited by the speed at which the electronics operate.
S. I. Moore; M. G. Ruppert; D. M. Harcombe; A. J. Fleming; Y. K. Yong
Design and Analysis of Low-Distortion Demodulators for Modulated Sensors Journal Article
In: IEEE/ASME Transactions on Mechatronics, vol. 24, no. 4, pp. 1861-1870, 2019, ISSN: 10834435, (This work was supported by the Australian Research Council Discovery Project DP170101813).
@article{Moore2019,
title = {Design and Analysis of Low-Distortion Demodulators for Modulated Sensors},
author = { S. I. Moore and M. G. Ruppert and D. M. Harcombe and A. J. Fleming and Y. K. Yong },
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2020/05/J19d-reduced.pdf},
doi = {10.1109/TMECH.2019.2928592},
issn = {10834435},
year = {2019},
date = {2019-07-17},
urldate = {2019-07-17},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {24},
number = {4},
pages = {1861-1870},
abstract = {System-based demodulators in the form of a Kalman and Lyapunov filter have been demonstrated to significantly outperform traditional demodulators, such as the lock-in amplifier, in bandwidth sensitive applications, for example high-speed atomic force microscopy. Building on their closed loop architecture, this article describes a broader class of high-speed closed-loop demodulators. The generic structure provides greater flexibility to independently control the bandwidth and sensitivity to out-of-band frequencies. A linear time-invariant description is derived which allows the utilization of linear control theory to design the demodulator. Experimental results on a nanopositioner with capacitive sensors demonstrate the realization of arbitrary demodulator dynamics while achieving excellent noise rejection.},
note = {This work was supported by the Australian Research Council Discovery Project DP170101813},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
System-based demodulators in the form of a Kalman and Lyapunov filter have been demonstrated to significantly outperform traditional demodulators, such as the lock-in amplifier, in bandwidth sensitive applications, for example high-speed atomic force microscopy. Building on their closed loop architecture, this article describes a broader class of high-speed closed-loop demodulators. The generic structure provides greater flexibility to independently control the bandwidth and sensitivity to out-of-band frequencies. A linear time-invariant description is derived which allows the utilization of linear control theory to design the demodulator. Experimental results on a nanopositioner with capacitive sensors demonstrate the realization of arbitrary demodulator dynamics while achieving excellent noise rejection.
K. Wang; M. G. Ruppert; C. Manzie; D. Nesic; Y. K. Yong
Adaptive Scan for Atomic Force Microscopy Based on Online Optimisation: Theory and Experiment Journal Article
In: IEEE Transactions on Control System Technology, 2019, (accepted for publication).
@article{Wang2019,
title = {Adaptive Scan for Atomic Force Microscopy Based on Online Optimisation: Theory and Experiment},
author = {K. Wang and M. G. Ruppert and C. Manzie and D. Nesic and Y. K. Yong},
url = {https://ieeexplore.ieee.org/document/8643730},
year = {2019},
date = {2019-01-31},
journal = {IEEE Transactions on Control System Technology},
abstract = {A major challenge in Atomic Force Microscopy
(AFM) is to reduce the scan duration while retaining the
image quality. Conventionally, the scan rate is restricted to a
sufficiently small value in order to ensure a desirable image
quality as well as a safe tip-sample contact force. This usually
results in a conservative scan rate for samples that have a
large variation in aspect ratio and/or for scan patterns that
have a varying linear velocity. In this paper, an adaptive scan
scheme is proposed to alleviate this problem. A scan line-based
performance metric balancing both imaging speed and accuracy
is proposed, and the scan rate is adapted such that the metric
is optimised online in the presence of aspect ratio and/or linear
velocity variations. The online optimisation is achieved using an
extremum-seeking (ES) approach, and a semi-global practical
asymptotic stability (SGPAS) result is shown for the overall
system. Finally, the proposed scheme is demonstrated via both
simulation and experiment.},
note = {accepted for publication},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A major challenge in Atomic Force Microscopy
(AFM) is to reduce the scan duration while retaining the
image quality. Conventionally, the scan rate is restricted to a
sufficiently small value in order to ensure a desirable image
quality as well as a safe tip-sample contact force. This usually
results in a conservative scan rate for samples that have a
large variation in aspect ratio and/or for scan patterns that
have a varying linear velocity. In this paper, an adaptive scan
scheme is proposed to alleviate this problem. A scan line-based
performance metric balancing both imaging speed and accuracy
is proposed, and the scan rate is adapted such that the metric
is optimised online in the presence of aspect ratio and/or linear
velocity variations. The online optimisation is achieved using an
extremum-seeking (ES) approach, and a semi-global practical
asymptotic stability (SGPAS) result is shown for the overall
system. Finally, the proposed scheme is demonstrated via both
simulation and experiment.
(AFM) is to reduce the scan duration while retaining the
image quality. Conventionally, the scan rate is restricted to a
sufficiently small value in order to ensure a desirable image
quality as well as a safe tip-sample contact force. This usually
results in a conservative scan rate for samples that have a
large variation in aspect ratio and/or for scan patterns that
have a varying linear velocity. In this paper, an adaptive scan
scheme is proposed to alleviate this problem. A scan line-based
performance metric balancing both imaging speed and accuracy
is proposed, and the scan rate is adapted such that the metric
is optimised online in the presence of aspect ratio and/or linear
velocity variations. The online optimisation is achieved using an
extremum-seeking (ES) approach, and a semi-global practical
asymptotic stability (SGPAS) result is shown for the overall
system. Finally, the proposed scheme is demonstrated via both
simulation and experiment.
A. A. Eielsen; Y. R. Teo; A. J. Fleming
Improving Robustness Filter Bandwidth in Repetitive Control by Considering Model Mismatch Journal Article
In: Asian Journal of Control, vol. 20, no. 3, pp. 1-11, 2018, ISSN: 1934-6093.
@article{J18g,
title = {Improving Robustness Filter Bandwidth in Repetitive Control by Considering Model Mismatch},
author = {A. A. Eielsen and Y. R. Teo and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/J18g.pdf},
doi = {10.1002/asjc.1437},
issn = {1934-6093},
year = {2018},
date = {2018-05-01},
journal = {Asian Journal of Control},
volume = {20},
number = {3},
pages = {1-11},
abstract = {Repetitive control (RC) is used to track and reject periodic signals by including a model of a periodic signal in the feedback path. The performance of RC can be improved by including an inverse plant response filter, but due to modeling uncertainty at high frequencies, a low-pass robustness filter is also required to limit the bandwidth of the signal model and ensure stability. The design of robustness filters is presently ad-hoc, which may result in excessively conservative performance. This article proposes a new automatic method for designing the robustness filter based on convex optimization and an uncertainty model. Experimental results on a nanopositioning system demonstrate that the proposed method outperforms the traditional brick-wall filter approach.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Repetitive control (RC) is used to track and reject periodic signals by including a model of a periodic signal in the feedback path. The performance of RC can be improved by including an inverse plant response filter, but due to modeling uncertainty at high frequencies, a low-pass robustness filter is also required to limit the bandwidth of the signal model and ensure stability. The design of robustness filters is presently ad-hoc, which may result in excessively conservative performance. This article proposes a new automatic method for designing the robustness filter based on convex optimization and an uncertainty model. Experimental results on a nanopositioning system demonstrate that the proposed method outperforms the traditional brick-wall filter approach.
A. Bazaei; Z. Cheng; Y. K. Yong; S. O. R. Moheimani
A Novel State Transformation Approach to Tracking of Piecewise Linear Trajectories Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 26, no. 1, pp. 128 - 138, 2018.
@article{Bazaei2018,
title = {A Novel State Transformation Approach to Tracking of Piecewise Linear Trajectories},
author = {A. Bazaei and Z. Cheng and Y. K. Yong and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2017/05/07851084.pdf},
doi = {10.1109/TCST.2017.2654061},
year = {2018},
date = {2018-01-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {26},
number = {1},
pages = {128 - 138},
abstract = {In this paper, we propose a novel approach for tracking of piecewise linear trajectories, such as triangular and staircase waveforms. We derive state and input transformations, which result in closed-loop error dynamics driven by a series of impulses. The proposed control structure takes the form of an output-feedback-feedforward system that is straightforward to implement. In contrast to the recently proposed tracking control methods for such trajectories, the closed-loop stability is not affected by the frequency of the desired triangular reference.
The method is implemented on a nanopositioner serving as the
scanning stage of an atomic force microscope.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
In this paper, we propose a novel approach for tracking of piecewise linear trajectories, such as triangular and staircase waveforms. We derive state and input transformations, which result in closed-loop error dynamics driven by a series of impulses. The proposed control structure takes the form of an output-feedback-feedforward system that is straightforward to implement. In contrast to the recently proposed tracking control methods for such trajectories, the closed-loop stability is not affected by the frequency of the desired triangular reference.
The method is implemented on a nanopositioner serving as the
scanning stage of an atomic force microscope.
The method is implemented on a nanopositioner serving as the
scanning stage of an atomic force microscope.
A. J. Fleming; Y. K. Yong
An Ultra-thin Monolithic XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material Journal Article
In: IEEE/ASME Transactions on Mechatronics, vol. 22, no. 6, pp. 2611-2618, 2017, ISBN: 1083-4435.
@article{J17k,
title = {An Ultra-thin Monolithic XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material},
author = {A. J. Fleming and Y. K. Yong},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2018/01/J17k.pdf},
doi = {10.1109/TMECH.2017.2755659},
isbn = {1083-4435},
year = {2017},
date = {2017-12-20},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {22},
number = {6},
pages = {2611-2618},
abstract = {The article describes an XY nanopositioning stage constructed from flexures and actuators machined into a single sheet of piezoelectric material. Ultrasonic machining is used to remove piezoelectric material and create electrode features. The constructed device is 0.508mm thick and has a travel range of 8.8um in the X and Y axes. The first resonance mode occurs at 597Hz which makes the device suitable for a wide range of standard nanopositioning applications where cost and size are considerations. Experimental atomic force microscopy is performed using the proposed device as a sample scanner.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
The article describes an XY nanopositioning stage constructed from flexures and actuators machined into a single sheet of piezoelectric material. Ultrasonic machining is used to remove piezoelectric material and create electrode features. The constructed device is 0.508mm thick and has a travel range of 8.8um in the X and Y axes. The first resonance mode occurs at 597Hz which makes the device suitable for a wide range of standard nanopositioning applications where cost and size are considerations. Experimental atomic force microscopy is performed using the proposed device as a sample scanner.
Y. K. Yong; A. J. Fleming
An Improved Low-frequency Correction Technique for Piezoelectric Force Sensors in High-speed Nanopositioning Systems Journal Article
In: Review of Scientific Instruments, vol. 88, no. 046105, pp. 1-3, 2017.
@article{J17f,
title = {An Improved Low-frequency Correction Technique for Piezoelectric Force Sensors in High-speed Nanopositioning Systems},
author = {Y. K. Yong and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2017/08/Yong2017_note.pdf},
year = {2017},
date = {2017-08-02},
journal = {Review of Scientific Instruments},
volume = {88},
number = {046105},
pages = {1-3},
abstract = {Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the high-pass response of the piezo and interface electronics. This article describes a simplified method for low-frequency correction that uses the piezoelectric sensor as an electrical component in a filter circuit. The resulting response is first-order, rather than second-order, with a cut-off frequency equal to that of a buffer circuit with the same input resistance. The proposed method is demonstrated to allow simultaneous damping and tracking control of a high-speed vertical nanopositioning stage},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the high-pass response of the piezo and interface electronics. This article describes a simplified method for low-frequency correction that uses the piezoelectric sensor as an electrical component in a filter circuit. The resulting response is first-order, rather than second-order, with a cut-off frequency equal to that of a buffer circuit with the same input resistance. The proposed method is demonstrated to allow simultaneous damping and tracking control of a high-speed vertical nanopositioning stage
M. G. Ruppert; A. G. Fowler; M. Maroufi; S. O. R. Moheimani
On-chip Dynamic Mode Atomic Force Microscopy: A silicon-on-insulator MEMS approach Journal Article
In: IEEE Journal of Microelectromechanical Systems, vol. 26, no. 1, pp. 215-225, 2017.
@article{Ruppert2017,
title = {On-chip Dynamic Mode Atomic Force Microscopy: A silicon-on-insulator MEMS approach},
author = {M. G. Ruppert and A. G. Fowler and M. Maroufi and S. O. R. Moheimani},
doi = {10.1109/JMEMS.2016.2628890},
year = {2017},
date = {2017-02-01},
journal = {IEEE Journal of Microelectromechanical Systems},
volume = {26},
number = {1},
pages = {215-225},
abstract = {The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional implementation as a relatively costly macroscale system is a barrier to its more widespread use. A microelectromechanical systems (MEMS) approach to AFM design has the potential to significantly reduce the cost and complexity of the AFM, expanding its utility beyond current applications. This paper presents an on-chip AFM based on a silicon-on-insulator MEMS fabrication process. The device features integrated xy electrostatic actuators and electrothermal sensors as well as an AlN piezoelectric layer for out-of-plane actuation and integrated deflection sensing of a microcantilever. The three-degree-of-freedom design allows the probe scanner to obtain topographic tapping-mode AFM images with an imaging range of up to 8μm x 8μm in closed loop.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional implementation as a relatively costly macroscale system is a barrier to its more widespread use. A microelectromechanical systems (MEMS) approach to AFM design has the potential to significantly reduce the cost and complexity of the AFM, expanding its utility beyond current applications. This paper presents an on-chip AFM based on a silicon-on-insulator MEMS fabrication process. The device features integrated xy electrostatic actuators and electrothermal sensors as well as an AlN piezoelectric layer for out-of-plane actuation and integrated deflection sensing of a microcantilever. The three-degree-of-freedom design allows the probe scanner to obtain topographic tapping-mode AFM images with an imaging range of up to 8μm x 8μm in closed loop.
Y. K. Yong
Preloading Piezoelectric Stack Actuator in High-speed Nanopositioning Systems Journal Article
In: Frontiers in Mechanical Engineering, vol. 2, pp. 1-9, 2016.
@article{Yong2016c,
title = {Preloading Piezoelectric Stack Actuator in High-speed Nanopositioning Systems},
author = {Y. K. Yong},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2016/11/fmech-02-00008-1.pdf},
year = {2016},
date = {2016-12-12},
journal = {Frontiers in Mechanical Engineering},
volume = {2},
pages = {1-9},
abstract = {Recent development in high-speed nanotechnology applications, such as scanning probe microscopy and nanofabrication, has increased interest on the advancement of high-bandwidth flexure-guided nanopositioning systems. These systems are capable of providing motions with sub-nanometer resolution over a positioning bandwidth of a few kilohertz or more. High-speed nanopositioning devices are commonly driven by compact and stiff piezoelectric stack actuators. However, these actuators are highly sensitive to tensile and lateral forces. During high-speed operations, excessive inertia force due to the effective mass of nanopositioning system could potentially damage the actuator. To protect the piezoelectric actuator, preload is often applied to compensate for these inertial forces. This article surveys key challenges in existing preload techniques in the context of high-speed nanopositioning designs, and explores how these challenges can be overcome.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Recent development in high-speed nanotechnology applications, such as scanning probe microscopy and nanofabrication, has increased interest on the advancement of high-bandwidth flexure-guided nanopositioning systems. These systems are capable of providing motions with sub-nanometer resolution over a positioning bandwidth of a few kilohertz or more. High-speed nanopositioning devices are commonly driven by compact and stiff piezoelectric stack actuators. However, these actuators are highly sensitive to tensile and lateral forces. During high-speed operations, excessive inertia force due to the effective mass of nanopositioning system could potentially damage the actuator. To protect the piezoelectric actuator, preload is often applied to compensate for these inertial forces. This article surveys key challenges in existing preload techniques in the context of high-speed nanopositioning designs, and explores how these challenges can be overcome.
Y. K. Yong; A. J. Fleming
High-speed Vertical Positioning Stage with Integrated Dual-sensor Arrangement Journal Article
In: Sensors & Actuators: A. Physical, vol. 248, pp. 184–192, 2016.
@article{J16d,
title = {High-speed Vertical Positioning Stage with Integrated Dual-sensor Arrangement},
author = {Y. K. Yong and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2016/08/1-s2.0-S0924424716303302-main-1.pdf},
doi = {https://doi.org/10.1016/j.sna.2016.06.042},
year = {2016},
date = {2016-12-01},
journal = {Sensors & Actuators: A. Physical},
volume = {248},
pages = {184--192},
abstract = {This article presents a novel vertical positioning stage with a dual-sensor arrangement suitable for scanning probe microscopy. The stage has a travel range of 8.4um and a first resonance frequency of 24kHz in the direction of travel. The sensor arrangement consists of an integrated piezoelectric force sensor and laminated piezoresistive strain sensor. The piezoelectric force sensor exhibits extremely low noise and introduces a zero into the dynamics which allows the use of integral force feedback. This control method provides excellent damping performance and guaranteed stability. The piezoresistive sensor is used for tracking control with an analog PI controller which is shown to be an approximate inverse of the damped system. The resulting closed-loop system has a bandwidth is 11.4kHz and 6-sigma resolution of 3.6nm, which is ideal for nanopositioning and atomic force microscopy (AFM) applications. The proposed vertical stage is used to replace the vertical axis of a commercial AFM. Scans are performed in constant-force contact mode with a tip velocity of 0.2mm/s, 1mm/s and 2mm/s. The recorded images contain negligible artefacts due to insufficient vertical bandwidth.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
This article presents a novel vertical positioning stage with a dual-sensor arrangement suitable for scanning probe microscopy. The stage has a travel range of 8.4um and a first resonance frequency of 24kHz in the direction of travel. The sensor arrangement consists of an integrated piezoelectric force sensor and laminated piezoresistive strain sensor. The piezoelectric force sensor exhibits extremely low noise and introduces a zero into the dynamics which allows the use of integral force feedback. This control method provides excellent damping performance and guaranteed stability. The piezoresistive sensor is used for tracking control with an analog PI controller which is shown to be an approximate inverse of the damped system. The resulting closed-loop system has a bandwidth is 11.4kHz and 6-sigma resolution of 3.6nm, which is ideal for nanopositioning and atomic force microscopy (AFM) applications. The proposed vertical stage is used to replace the vertical axis of a commercial AFM. Scans are performed in constant-force contact mode with a tip velocity of 0.2mm/s, 1mm/s and 2mm/s. The recorded images contain negligible artefacts due to insufficient vertical bandwidth.
Y. K. Yong; S. P. Wadikhaye; A. J. Fleming
High-Speed Single-Stage and Dual-Stage Vertical Positioners Journal Article
In: Review of Scientific Instruments, vol. 87, no. 085104, pp. (1-8), 2016.
@article{J16e,
title = {High-Speed Single-Stage and Dual-Stage Vertical Positioners},
author = {Y. K. Yong and S. P. Wadikhaye and A. J. Fleming },
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2017/01/J16e.pdf},
year = {2016},
date = {2016-09-01},
journal = {Review of Scientific Instruments},
volume = {87},
number = {085104},
pages = {(1-8)},
abstract = {This article presents a high-speed single- and dual-stage vertical positioner for applications in optical systems. Each positioner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage positioner has a displacement range of 7.6um and a first resonance frequency of 46.8kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage positioner has a combined travel range of approximately 10um and a first evident resonance frequency of 130kHz.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
This article presents a high-speed single- and dual-stage vertical positioner for applications in optical systems. Each positioner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage positioner has a displacement range of 7.6um and a first resonance frequency of 46.8kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage positioner has a combined travel range of approximately 10um and a first evident resonance frequency of 130kHz.
Y. R. Teo; A. A. Eielsen; J. T. Gravdahl; A. J. Fleming
A Simplified Method For Discrete-Time Repetitive Control Using Model-Less FIR Filter Inversion Journal Article
In: Journal of Dynamic Systems, Measurement and Control, vol. 138, no. 8, pp. 081002, 2016.
@article{J16c,
title = {A Simplified Method For Discrete-Time Repetitive Control Using Model-Less FIR Filter Inversion},
author = {Y. R. Teo and A. A. Eielsen and J. T. Gravdahl and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2016/06/J16c.pdf},
doi = {10.1115/1.4033274},
year = {2016},
date = {2016-08-01},
journal = {Journal of Dynamic Systems, Measurement and Control},
volume = {138},
number = {8},
pages = {081002},
abstract = {Repetitive control (RC) achieves tracking and rejection of periodic exogenous signals by incorporating a model of a periodic signal in the feedback path. To improve the performance, an inverse plant response filter (IPRF) is used. To improve robustness, the periodic signal model is bandwidth-limited. This limitation is largely dependent on the accuracy of the IPRF. A new method is presented for synthesizing the IPRF for discrete-time RC. The method produces filters in a simpler and more consistent manner than existing best-practice methods available in the literature, as the only variable involved is the selection of a windowing function. It is also more efficient in terms of memory and computational complexity than existing methods. Experimental results for a nanopositioning stage show that the proposed method yields the same or better tracking performance compared to existing methods.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Repetitive control (RC) achieves tracking and rejection of periodic exogenous signals by incorporating a model of a periodic signal in the feedback path. To improve the performance, an inverse plant response filter (IPRF) is used. To improve robustness, the periodic signal model is bandwidth-limited. This limitation is largely dependent on the accuracy of the IPRF. A new method is presented for synthesizing the IPRF for discrete-time RC. The method produces filters in a simpler and more consistent manner than existing best-practice methods available in the literature, as the only variable involved is the selection of a windowing function. It is also more efficient in terms of memory and computational complexity than existing methods. Experimental results for a nanopositioning stage show that the proposed method yields the same or better tracking performance compared to existing methods.
Y. K. Yong
A new preload mechanism for a high-speed piezoelectric stack nanopositioner Journal Article
In: Mechatronics, vol. 36, pp. 159-166, 2016.
@article{Yong2016b,
title = {A new preload mechanism for a high-speed piezoelectric stack nanopositioner},
author = {Y. K. Yong},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Yong2016_preload.pdf},
year = {2016},
date = {2016-04-13},
journal = {Mechatronics},
volume = {36},
pages = {159-166},
abstract = {Piezoelectric stack actuators are the actuator of choice for many ultra-high precision systems owning to its fast responses and high pushing force capabilities. These actuators are constructed by bonding multiple piezoelectric layers together. An inevitable drawback of these actuators is that there are highly intolerant to tensile and shear forces. During high-speed operations, inertial forces due to effective mass of the system cause the actuators to experience excessive tensile forces. To avoid damage to the actuators, preload must be applied to compensate for these forces. In many nanopositioning systems, flexures are used to provide preload to the piezoelectric stack actuators. However, for high-speed systems with stiff flexures, displacing the flexures and sliding the actuators in place to preload them is a difficult task. One may reduce the stiffness of the flexures to make the preload process more feasible; however, this reduces the mechanical bandwidth of the system. This paper presents a novel preload mechanism that tackles the limitations mentioned above. The preload stage, which is connected in parallel mechanically to a high-speed vertical nanopositioner, allows the piezoelectric stack actuator to be installed and preloaded easily without significantly trading of the stiffness and speed of the nanopositioning system. The proposed vertical nanopositioner has a travel range of 10.6 μ m. Its first resonant mode appears at about 24 kHz along
the actuation direction.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Piezoelectric stack actuators are the actuator of choice for many ultra-high precision systems owning to its fast responses and high pushing force capabilities. These actuators are constructed by bonding multiple piezoelectric layers together. An inevitable drawback of these actuators is that there are highly intolerant to tensile and shear forces. During high-speed operations, inertial forces due to effective mass of the system cause the actuators to experience excessive tensile forces. To avoid damage to the actuators, preload must be applied to compensate for these forces. In many nanopositioning systems, flexures are used to provide preload to the piezoelectric stack actuators. However, for high-speed systems with stiff flexures, displacing the flexures and sliding the actuators in place to preload them is a difficult task. One may reduce the stiffness of the flexures to make the preload process more feasible; however, this reduces the mechanical bandwidth of the system. This paper presents a novel preload mechanism that tackles the limitations mentioned above. The preload stage, which is connected in parallel mechanically to a high-speed vertical nanopositioner, allows the piezoelectric stack actuator to be installed and preloaded easily without significantly trading of the stiffness and speed of the nanopositioning system. The proposed vertical nanopositioner has a travel range of 10.6 μ m. Its first resonant mode appears at about 24 kHz along
the actuation direction.
the actuation direction.
A. J. Fleming; B. S. Routley
A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing Journal Article
In: Review of Scientific Instruments, vol. 86, pp. 115001(1-7), 2015.
@article{J15f,
title = {A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing},
author = {A. J. Fleming and B. S. Routley},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/12/J15f.pdf},
doi = {10.1063/1.4935469},
year = {2015},
date = {2015-12-31},
journal = {Review of Scientific Instruments},
volume = {86},
pages = {115001(1-7)},
abstract = {This article describes a position sensitive interferometer with closed-loop control of the reference mirror. A calibrated nanopositioner is used to lock the interferometer phase to the most sensitive point in the interfer- ogram. In this con guration, large low-frequency movements of the sensor mirror can be detected from the control signal applied to the nanopositioner and high-frequency short-range signals can be measured directly from the photodiode. It is demonstrated that these two signals are complementary and can be summed to find the total displacement. The resulting interferometer has a number of desirable characteristics: it is optically simple, does not require polarization or modulation to detect the direction of motion, does not require fringe-counting or interpolation electronics, and has a bandwidth equal to that of the photodiode. Experimental results demonstrate the frequency response analysis of a high-speed positioning stage. The proposed instru-
ment is ideal for measuring the frequency response of nanopositioners, electro-optical components, MEMs devices, Ultrasonic devices, and sensors such as surface acoustic wave detectors.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
This article describes a position sensitive interferometer with closed-loop control of the reference mirror. A calibrated nanopositioner is used to lock the interferometer phase to the most sensitive point in the interfer- ogram. In this con guration, large low-frequency movements of the sensor mirror can be detected from the control signal applied to the nanopositioner and high-frequency short-range signals can be measured directly from the photodiode. It is demonstrated that these two signals are complementary and can be summed to find the total displacement. The resulting interferometer has a number of desirable characteristics: it is optically simple, does not require polarization or modulation to detect the direction of motion, does not require fringe-counting or interpolation electronics, and has a bandwidth equal to that of the photodiode. Experimental results demonstrate the frequency response analysis of a high-speed positioning stage. The proposed instru-
ment is ideal for measuring the frequency response of nanopositioners, electro-optical components, MEMs devices, Ultrasonic devices, and sensors such as surface acoustic wave detectors.
ment is ideal for measuring the frequency response of nanopositioners, electro-optical components, MEMs devices, Ultrasonic devices, and sensors such as surface acoustic wave detectors.
D. Russell; A. J. Fleming; S. S. Aphale
In: Journal of Dynamic Systems, Measurement and Control, vol. 137, no. 10, pp. 1-8, 2015.
@article{J15b,
title = {Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced Positioning Bandwidth of Nanopositioners},
author = {D. Russell and A. J. Fleming and S. S. Aphale},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/07/DS-14-1539.pdf},
doi = {10.1115/1.4030723},
year = {2015},
date = {2015-12-30},
journal = {Journal of Dynamic Systems, Measurement and Control},
volume = {137},
number = {10},
pages = {1-8},
abstract = {Positive Velocity and Position Feedback (PVPF) is a widely used control scheme in lightly damped resonant systems with collocated sensor actuator pairs. The popularity of PVPF is due to the ability to achieve a chosen damping ratio by repositioning the poles of the system. The addition of a tracking controller, to reduce the effects of inherent nonlinearities, causes the poles to deviate from the intended location and can be a detriment to the damping achieved. By designing the PVPF and tracking controllers simultaneously, the optimal damping and tracking can be achieved. Simulations show full damping of the first resonance mode and significantly higher bandwidth than that achieved using the traditional PVPF design method, allowing for high speed scanning with accurate tracking. Experimental results are also provided to verify performance in implementation.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Positive Velocity and Position Feedback (PVPF) is a widely used control scheme in lightly damped resonant systems with collocated sensor actuator pairs. The popularity of PVPF is due to the ability to achieve a chosen damping ratio by repositioning the poles of the system. The addition of a tracking controller, to reduce the effects of inherent nonlinearities, causes the poles to deviate from the intended location and can be a detriment to the damping achieved. By designing the PVPF and tracking controllers simultaneously, the optimal damping and tracking can be achieved. Simulations show full damping of the first resonance mode and significantly higher bandwidth than that achieved using the traditional PVPF design method, allowing for high speed scanning with accurate tracking. Experimental results are also provided to verify performance in implementation.
A. J. Fleming; Y. R. Teo; K. K. Leang
Low-order Damping and Tracking Control for Scanning Probe Systems Journal Article
In: Frontiers in Mechanical Engineering, vol. 1, pp. 1-9, 2015.
@article{J15e,
title = {Low-order Damping and Tracking Control for Scanning Probe Systems},
author = {A. J. Fleming and Y. R. Teo and K. K. Leang
},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/12/J15e.pdf},
doi = {10.3389/fmech.2015.00014},
year = {2015},
date = {2015-12-30},
journal = {Frontiers in Mechanical Engineering},
volume = {1},
pages = {1-9},
abstract = {This article describes an improvement to integral resonance damping control (IRC) for reference tracking applications such as Scanning Probe Microscopy and nanofabrication. It is demonstrated that IRC control introduces a low-frequency pole into the tracking loop which is detrimental for performance. In this work, the location of this pole is found analytically using Cardano’s method then compensated by parameterizing the tracking controller accordingly. This approach maximizes the closed-loop bandwidth whilst being robust to changes in the resonance frequencies. The refined IRC controller is comprehensively compared to other low-order methods in a practical environment.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
This article describes an improvement to integral resonance damping control (IRC) for reference tracking applications such as Scanning Probe Microscopy and nanofabrication. It is demonstrated that IRC control introduces a low-frequency pole into the tracking loop which is detrimental for performance. In this work, the location of this pole is found analytically using Cardano’s method then compensated by parameterizing the tracking controller accordingly. This approach maximizes the closed-loop bandwidth whilst being robust to changes in the resonance frequencies. The refined IRC controller is comprehensively compared to other low-order methods in a practical environment.
Y. R. Teo; A. J. Fleming
Optimal integral force feedback for active vibration control Journal Article
In: Journal of Sound and Vibration, vol. 356, no. 11, pp. 20-33, 2015.
@article{J15c,
title = {Optimal integral force feedback for active vibration control},
author = {Y. R. Teo and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/10/J15c.pdf},
year = {2015},
date = {2015-06-27},
journal = {Journal of Sound and Vibration},
volume = {356},
number = {11},
pages = {20-33},
abstract = {This paper proposes an improvement to Integral Force Feedback (IFF), which is a popular method for active vibration control for structures and mechanical systems. Benefits of IFF includes robustness, guaranteed stability and simplicity. However, the maximum damping performance is dependent on the stiffness of the system; hence, some systems cannot be adequately controlled. In this paper, an improvement to the classical force feedback control scheme is proposed. The improved method achieves arbitrary damping for any mechanical system by introducing a feed-through term. The proposed improvement is experimentally demonstrated by actively damping an objective lens assembly for a high-speed confocal microscope.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
This paper proposes an improvement to Integral Force Feedback (IFF), which is a popular method for active vibration control for structures and mechanical systems. Benefits of IFF includes robustness, guaranteed stability and simplicity. However, the maximum damping performance is dependent on the stiffness of the system; hence, some systems cannot be adequately controlled. In this paper, an improvement to the classical force feedback control scheme is proposed. The improved method achieves arbitrary damping for any mechanical system by introducing a feed-through term. The proposed improvement is experimentally demonstrated by actively damping an objective lens assembly for a high-speed confocal microscope.
Y. K. Yong; S. O. R. Moheimani
Collocated Z-Axis Control of a High-Speed Nanopositioner for Video-Rate Atomic Force Microscopy Journal Article
In: IEEE Transactions on Nanotechnology, vol. 14, no. 2, pp. 338-345, 2015, ISSN: 1536-125X.
@article{Yong2015,
title = {Collocated Z-Axis Control of a High-Speed Nanopositioner for Video-Rate Atomic Force Microscopy},
author = {Y. K. Yong and S. O. R. Moheimani},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Yong%202015%20-collocated%20Z-axis%20control.pdf},
doi = {10.1109/TNANO.2015.2394327},
issn = {1536-125X},
year = {2015},
date = {2015-03-01},
journal = {IEEE Transactions on Nanotechnology},
volume = {14},
number = {2},
pages = {338-345},
abstract = {A key hurdle to achieve video-rate atomic force microscopy (AFM) in constant-force contact mode is the inadequate bandwidth of the vertical feedback control loop. This paper describes techniques used to increase the vertical tracking bandwidth of a nanopositioner to a level that is sufficient for video-rate AFM. These techniques involve the combination of: a high-speed XYZ nanopositioner; a passive damping technique that cancels the inertial forces of the Z actuator which in turns eliminates the low 20-kHz vertical resonant mode of the nanopositioner; an active control technique that is used to augment damping to high vertical resonant modes at 60 kHz and above. The implementation of these techniques allows a tenfold increase in the vertical tracking bandwidth, from 2.3 (without damping) to 28.1 kHz. This allows high-quality, video-rate AFM images to be captured at 10 frames/s without noticeable artifacts associated with vibrations and insufficient vertical tracking bandwidth.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A key hurdle to achieve video-rate atomic force microscopy (AFM) in constant-force contact mode is the inadequate bandwidth of the vertical feedback control loop. This paper describes techniques used to increase the vertical tracking bandwidth of a nanopositioner to a level that is sufficient for video-rate AFM. These techniques involve the combination of: a high-speed XYZ nanopositioner; a passive damping technique that cancels the inertial forces of the Z actuator which in turns eliminates the low 20-kHz vertical resonant mode of the nanopositioner; an active control technique that is used to augment damping to high vertical resonant modes at 60 kHz and above. The implementation of these techniques allows a tenfold increase in the vertical tracking bandwidth, from 2.3 (without damping) to 28.1 kHz. This allows high-quality, video-rate AFM images to be captured at 10 frames/s without noticeable artifacts associated with vibrations and insufficient vertical tracking bandwidth.
M. Namavar; A. J. Fleming; M. Aleyaasin; K. Nakkeeran; S. S. Aphale
An Analytical approach to integral resonant control of second-order systems Journal Article
In: IEEE/ASME Transactions on Mechatronics, vol. 19, no. 2, pp. 651–659, 2014.
@article{J14c,
title = {An Analytical approach to integral resonant control of second-order systems},
author = {M. Namavar and A. J. Fleming and M. Aleyaasin and K. Nakkeeran and S. S. Aphale},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2014/05/J14c.pdf},
year = {2014},
date = {2014-12-01},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {19},
number = {2},
pages = {651--659},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming
Measuring and predicting resolution in nanopositioning systems Journal Article
In: Mechatronics, vol. 24, no. 8, pp. 605-618, 2014.
@article{J14a,
title = {Measuring and predicting resolution in nanopositioning systems},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2014/09/J14a.pdf},
year = {2014},
date = {2014-12-01},
journal = {Mechatronics},
volume = {24},
number = {8},
pages = {605-618},
abstract = {The resolution is a critical performance metric of precision mechatronic systems such as nanopositioners and atomic force microscopes. However, there is not presently a strict definition for the measurement or reporting of this parameter. This article defines resolution as the smallest distance between two nonoverlapping position commands. Methods are presented for simulating and predicting resolution in both the time and frequency domains. In order to simplify resolution measurement, a new technique is proposed which allows the resolution to be estimated from a measurement of the closed-loop actuator voltage. Simulation and experimental results demonstrate the proposed techniques. The paper concludes by
comparing the resolution benefits of new control schemes over standard output feedback techniques.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
The resolution is a critical performance metric of precision mechatronic systems such as nanopositioners and atomic force microscopes. However, there is not presently a strict definition for the measurement or reporting of this parameter. This article defines resolution as the smallest distance between two nonoverlapping position commands. Methods are presented for simulating and predicting resolution in both the time and frequency domains. In order to simplify resolution measurement, a new technique is proposed which allows the resolution to be estimated from a measurement of the closed-loop actuator voltage. Simulation and experimental results demonstrate the proposed techniques. The paper concludes by
comparing the resolution benefits of new control schemes over standard output feedback techniques.
comparing the resolution benefits of new control schemes over standard output feedback techniques.
Y. R. Teo; D. Russell; S. S. Aphale; A. J. Fleming
Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy Journal Article
In: Mechatronics, vol. 24, no. 6, pp. 701-711, 2014.
@article{J14d,
title = {Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy},
author = {Y. R. Teo and D. Russell and S. S. Aphale and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2014/09/J14d.pdf},
year = {2014},
date = {2014-12-01},
journal = {Mechatronics},
volume = {24},
number = {6},
pages = {701-711},
abstract = {This paper describes a new vibration damping technique based on Integral Force Feedback (IFF). Classical IFF utilizes a force sensor and integral controller to damp the resonance modes of a mechanical system. However, the maximum modal damping depends on the frequency difference between the system’s poles and zeros. If the frequency difference is small, the achievable modal damping may be severely limited. The proposed technique allows an arbitrary damping ratio to be achieved by introducing an additional feed-through term to the control system. This results in an extra degree of freedom that allows the position of the zeros to be modified and the maximum modal damping to be increased. The second contribution of this paper is a structured PI tracking controller that is parameterized to cancel the additional pole introduced by integral force feedback. The parameterized controller has only one tuning parameter and does not suffer from reduced phase margin. The proposed techniques are demonstrated on a piezoelectric objective lens positioner. The results show exceptional tracking and damping performance while maintaining insensitivity to changes in resonance frequency. The maximum bandwidth achievable with a commercial PID controller is 26.1 Hz. In contrast, with the proposed damping and tracking controller, the bandwidth is increased to 255 Hz.},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
This paper describes a new vibration damping technique based on Integral Force Feedback (IFF). Classical IFF utilizes a force sensor and integral controller to damp the resonance modes of a mechanical system. However, the maximum modal damping depends on the frequency difference between the system’s poles and zeros. If the frequency difference is small, the achievable modal damping may be severely limited. The proposed technique allows an arbitrary damping ratio to be achieved by introducing an additional feed-through term to the control system. This results in an extra degree of freedom that allows the position of the zeros to be modified and the maximum modal damping to be increased. The second contribution of this paper is a structured PI tracking controller that is parameterized to cancel the additional pole introduced by integral force feedback. The parameterized controller has only one tuning parameter and does not suffer from reduced phase margin. The proposed techniques are demonstrated on a piezoelectric objective lens positioner. The results show exceptional tracking and damping performance while maintaining insensitivity to changes in resonance frequency. The maximum bandwidth achievable with a commercial PID controller is 26.1 Hz. In contrast, with the proposed damping and tracking controller, the bandwidth is increased to 255 Hz.
A. Bazaei; S. O. R. Moheimani; Y. K. Yong
Improvement of transient response in signal transformation approach by proper compensator initialization Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 22, no. 2, pp. 729-736, 2014.
@article{Bazaei2014729,
title = {Improvement of transient response in signal transformation approach by proper compensator initialization},
author = {A. Bazaei and S. O. R. Moheimani and Y. K. Yong},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Bazaei2014%20-%20Transient%20Response.pdf},
doi = {10.1109/TCST.2013.2261875},
year = {2014},
date = {2014-03-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {22},
number = {2},
pages = {729-736},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. Mohammadi; A. G. Fowler; Y. K. Yong; S. O. R. Moheimani
A feedback controlled MEMS nanopositioner for on-chip high-speed AFM Journal Article
In: Journal of Microelectromechanical Systems, vol. 23, no. 3, pp. 610-619, 2014.
@article{Mohammadi2014610,
title = {A feedback controlled MEMS nanopositioner for on-chip high-speed AFM},
author = {A. Mohammadi and A. G. Fowler and Y. K. Yong and S. O. R. Moheimani},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Mohammadi%202014%20-%20MEMS%20Nanopositioner.pdf},
doi = {10.1109/JMEMS.2013.2287506},
year = {2014},
date = {2014-01-01},
journal = {Journal of Microelectromechanical Systems},
volume = {23},
number = {3},
pages = {610-619},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
S. P. Wadikhaye; Y. K. Yong; S. O. R. Moheimani
A serial-kinematic nanopositioner for high-speed atomic force microscopy Journal Article
In: Review of Scientific Instruments, vol. 85, no. 105104, pp. (1-10), 2014.
@article{Wadikhaye2014a,
title = {A serial-kinematic nanopositioner for high-speed atomic force microscopy},
author = {S. P. Wadikhaye and Y. K. Yong and S. O. R. Moheimani},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/A%20serial%20kinematic%20nanopos%20for%20HSAFM.pdf},
doi = {10.1063/1.4897483},
year = {2014},
date = {2014-01-01},
journal = {Review of Scientific Instruments},
volume = {85},
number = {105104},
pages = {(1-10)},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Y. K. Yong; A. Bazaei; S. O. R. Moheimani
Video-rate lissajous-scan atomic force microscopy Journal Article
In: IEEE Transactions on Nanotechnology, vol. 13, no. 1, pp. 85-93, 2014.
@article{Yong201485,
title = {Video-rate lissajous-scan atomic force microscopy},
author = {Y. K. Yong and A. Bazaei and S. O. R. Moheimani},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Yong2014%20-%20Video-rate%20Lissajous.pdf},
doi = {10.1109/TNANO.2013.2292610},
year = {2014},
date = {2014-01-01},
journal = {IEEE Transactions on Nanotechnology},
volume = {13},
number = {1},
pages = {85-93},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
S. P. Wadikhaye; Y. K. Yong; B. Bhikkaji; S. O. R. Moheimani
Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner Journal Article
In: Smart Materials and Structures, vol. 23, no. 2, 2014.
@article{Wadikhaye2014,
title = {Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner},
author = {S. P. Wadikhaye and Y. K. Yong and B. Bhikkaji and S. O. R. Moheimani},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Wadikhaye2014.pdf},
year = {2014},
date = {2014-01-01},
journal = {Smart Materials and Structures},
volume = {23},
number = {2},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming
A review of nanometer resolution position sensors: operation and performance Journal Article
In: Sensors and Actuators A: Physical, vol. 190, pp. 106-126, 2013.
@article{J13a,
title = {A review of nanometer resolution position sensors: operation and performance},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J13a.pdf},
year = {2013},
date = {2013-12-01},
journal = {Sensors and Actuators A: Physical},
volume = {190},
pages = {106-126},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Y. K. Yong; A. J. Fleming; S. O. R. Moheimani
A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner Journal Article
In: IEEE/ASME Transactions on Mechatronics, vol. 18, no. 3, pp. 1113-1121, 2013.
@article{J13b,
title = {A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner},
author = {Y. K. Yong and A. J. Fleming and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J13b.pdf},
year = {2013},
date = {2013-12-01},
journal = {IEEE/ASME Transactions on Mechatronics},
volume = {18},
number = {3},
pages = {1113-1121},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; B. Ninness; A. G. Wills
Recovering the spectrum of a low level signal from two noisy measurements using the cross power spectral density Journal Article
In: Review of Scientific Instruments, vol. 84, pp. 085112, 6 pages, 2013.
@article{J13e,
title = {Recovering the spectrum of a low level signal from two noisy measurements using the cross power spectral density},
author = {A. J. Fleming and B. Ninness and A. G. Wills},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J13e.pdf},
year = {2013},
date = {2013-12-01},
journal = {Review of Scientific Instruments},
volume = {84},
pages = {085112, 6 pages},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming
A method for estimating the resolution of nanopositioning systems Journal Article
In: Review of Scientific Instruments, vol. 83, no. 8, pp. 086101, 2012.
@article{J12a,
title = {A method for estimating the resolution of nanopositioning systems},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J12a.pdf},
year = {2012},
date = {2012-12-01},
journal = {Review of Scientific Instruments},
volume = {83},
number = {8},
pages = {086101},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming
Getting the message about noise across, loud and clear Journal Article
In: IEEE Control Systems, vol. 32, no. 5, pp. 110-112, 2012.
@article{J12c,
title = {Getting the message about noise across, loud and clear},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J12c.pdf},
year = {2012},
date = {2012-12-01},
journal = {IEEE Control Systems},
volume = {32},
number = {5},
pages = {110-112},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. Bazaei; Y. K. Yong; S. O. R. Moheimani
High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues Journal Article
In: Review of Scientific Instruments, vol. 83, no. 063701, pp. (1-10), 2012.
@article{Bazaei2012,
title = {High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues},
author = {A. Bazaei and Y. K. Yong and S. O. R. Moheimani},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/High-speed_liss.pdf},
doi = {10.1063/1.4725525},
year = {2012},
date = {2012-01-01},
journal = {Review of Scientific Instruments},
volume = {83},
number = {063701},
pages = {(1-10)},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
S. P. Wadikhaye; Y. K. Yong; S. O. R. Moheimani
Design of a compact serial-kinematic scanner for high-speed atomic force microscopy: An analytical approach Journal Article
In: Micro and Nano Letters, vol. 7, no. 4, pp. 309-313, 2012.
@article{Wadikhaye2012309,
title = {Design of a compact serial-kinematic scanner for high-speed atomic force microscopy: An analytical approach},
author = {S. P. Wadikhaye and Y. K. Yong and S. O. R. Moheimani},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Serial_kinematic.pdf},
doi = {10.1049/mnl.2011.0477},
year = {2012},
date = {2012-01-01},
journal = {Micro and Nano Letters},
volume = {7},
number = {4},
pages = {309-313},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming
Dual-stage vertical feedback for high speed-scanning probe microscopy Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 19, no. 1, pp. 156–165, 2011.
@article{J11a,
title = {Dual-stage vertical feedback for high speed-scanning probe microscopy},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J11a.pdf},
year = {2011},
date = {2011-12-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {19},
number = {1},
pages = {156--165},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
B. J. Kenton; A. J. Fleming; K. K. Leang
A compact ultra-fast vertical nanopositioner for improving SPM scan speed Journal Article
In: Review of Scientific Instruments, vol. 82, no. 12, pp. 123703(1-8), 2011.
@article{J11b,
title = {A compact ultra-fast vertical nanopositioner for improving SPM scan speed},
author = {B. J. Kenton and A. J. Fleming and K. K. Leang},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J11b.pdf},
year = {2011},
date = {2011-12-01},
journal = {Review of Scientific Instruments},
volume = {82},
number = {12},
pages = {123703(1-8)},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
M. Fairbairn; S. O. R. Moheimani; A. J. Fleming
Q control of an atomic force microscope micro-cantilever: a sensor-less approach Journal Article
In: IEEE/ASME Journal of Microelectromechanical Systems, vol. 20, no. 6, pp. 1372–1381, 2011.
@article{J11c,
title = {Q control of an atomic force microscope micro-cantilever: a sensor-less approach},
author = {M. Fairbairn and S. O. R. Moheimani and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J11c.pdf},
year = {2011},
date = {2011-12-01},
journal = {IEEE/ASME Journal of Microelectromechanical Systems},
volume = {20},
number = {6},
pages = {1372--1381},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming
Quantitative SPM topographies by charge linearization of the vertical actuator Journal Article
In: Review of Scientific Instruments, vol. 81, no. 10, pp. 103701(1-5), 2010.
@article{J10f,
title = {Quantitative SPM topographies by charge linearization of the vertical actuator},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J10f.pdf},
year = {2010},
date = {2010-12-01},
journal = {Review of Scientific Instruments},
volume = {81},
number = {10},
pages = {103701(1-5)},
crossref = {(Featured in the Virtual Journal of Nanoscale Science)},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming
Nanopositioning system with force feedback for high-performance tracking and vibration control Journal Article
In: IEEE Transactions on Mechatronics, vol. 15, no. 3, pp. 433–447, 2010.
@article{J10a,
title = {Nanopositioning system with force feedback for high-performance tracking and vibration control},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J10a.pdf},
year = {2010},
date = {2010-12-01},
journal = {IEEE Transactions on Mechatronics},
volume = {15},
number = {3},
pages = {433--447},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; K. K. Leang
Integrated strain and force feedback for high performance control of piezoelectric actuators Journal Article
In: Sensors and Actuators A, vol. 161, no. 1-2, pp. 256–265, 2010.
@article{J10b,
title = {Integrated strain and force feedback for high performance control of piezoelectric actuators},
author = {A. J. Fleming and K. K. Leang},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J10b.pdf},
year = {2010},
date = {2010-12-01},
journal = {Sensors and Actuators A},
volume = {161},
number = {1-2},
pages = {256--265},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; B. J. Kenton; K. K. Leang
Bridging the gap between conventional and video-speed scanning probe microscopes Journal Article
In: Ultramicroscopy, vol. 110, no. 9, pp. 1205–1214, 2010.
@article{J10c,
title = {Bridging the gap between conventional and video-speed scanning probe microscopes},
author = {A. J. Fleming and B. J. Kenton and K. K. Leang},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J10c.pdf},
year = {2010},
date = {2010-12-01},
journal = {Ultramicroscopy},
volume = {110},
number = {9},
pages = {1205--1214},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; S. S. Aphale; S. O. R. Moheimani
A new method for robust damping and tracking control of scanning probe microscope positioning stages Journal Article
In: IEEE Transactions on Nanotechnology, vol. 9, no. 4, pp. 438–448, 2010.
@article{J10d,
title = {A new method for robust damping and tracking control of scanning probe microscope positioning stages},
author = {A. J. Fleming and S. S. Aphale and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J10d.pdf},
year = {2010},
date = {2010-12-01},
journal = {IEEE Transactions on Nanotechnology},
volume = {9},
number = {4},
pages = {438--448},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
K. K. Leang; A. J. Fleming
High-speed serial-kinematic AFM scanner: design and drive considerations Journal Article
In: Asian Journal of Control, vol. 11, no. 2, pp. 144-153, 2009.
@article{J09a,
title = {High-speed serial-kinematic AFM scanner: design and drive considerations},
author = {K. K. Leang and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J09a.pdf},
year = {2009},
date = {2009-12-01},
journal = {Asian Journal of Control},
volume = {11},
number = {2},
pages = {144-153},
crossref = {(Special Issue)},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; A. G. Wills
Optimal periodic trajectories for band-limited systems Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 13, no. 3, pp. 552-562, 2009.
@article{J09b,
title = {Optimal periodic trajectories for band-limited systems},
author = {A. J. Fleming and A. G. Wills},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J09b.pdf},
year = {2009},
date = {2009-12-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {13},
number = {3},
pages = {552-562},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming
A MHz bandwidth dual-amplifier for driving piezoelectric actuators and other highly capacitive loads Journal Article
In: Review of Scientific Instruments, vol. 80, pp. 104701(1-7), 2009.
@article{J09c,
title = {A MHz bandwidth dual-amplifier for driving piezoelectric actuators and other highly capacitive loads},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J09c.pdf},
year = {2009},
date = {2009-12-01},
journal = {Review of Scientific Instruments},
volume = {80},
pages = {104701(1-7)},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
J. Maess; A. J. Fleming; F. Allgöwer
Simulation of dynamics-coupling in piezoelectric tube scanners by reduced order finite element models Journal Article
In: Review of Scientific Instruments, vol. 79, pp. 015105(1-9), 2008.
@article{J08a,
title = {Simulation of dynamics-coupling in piezoelectric tube scanners by reduced order finite element models},
author = {J. Maess and A. J. Fleming and F. Allgöwer},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J08a.pdf},
year = {2008},
date = {2008-12-01},
journal = {Review of Scientific Instruments},
volume = {79},
pages = {015105(1-9)},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
G. M. Clayton; S. Tien; S. Devasia; A. J. Fleming; S. O. R. Moheimani
Inverse-feedforward of charge controlled piezopositioners Journal Article
In: Mechatronics, vol. 18, pp. 273–281, 2008.
@article{J08c,
title = {Inverse-feedforward of charge controlled piezopositioners},
author = {G. M. Clayton and S. Tien and S. Devasia and A. J. Fleming and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J08c.pdf},
year = {2008},
date = {2008-12-01},
journal = {Mechatronics},
volume = {18},
pages = {273--281},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; A. G. Wills; S. O. R. Moheimani
Sensor fusion for improved control of piezoelectric tube scanners Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 15, no. 6, pp. 1265–6536, 2008.
@article{J08d,
title = {Sensor fusion for improved control of piezoelectric tube scanners},
author = {A. J. Fleming and A. G. Wills and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J08d.pdf},
year = {2008},
date = {2008-12-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {15},
number = {6},
pages = {1265--6536},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; K. K. Leang
Charge drives for scanning probe microscope positioning stages Journal Article
In: Ultramicroscopy, vol. 108, no. 12, pp. 1551-1557, 2008.
@article{J08e,
title = {Charge drives for scanning probe microscope positioning stages},
author = {A. J. Fleming and K. K. Leang},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J08e.pdf},
year = {2008},
date = {2008-12-01},
journal = {Ultramicroscopy},
volume = {108},
number = {12},
pages = {1551-1557},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
B. Bhikkaji; M. Ratnam; A. J. Fleming; S. O. R. Moheimani
High-performance control of piezoelectric tube scanners Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 15, no. 5, pp. 853-866, 2007.
@article{J07d,
title = {High-performance control of piezoelectric tube scanners},
author = {B. Bhikkaji and M. Ratnam and A. J. Fleming and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J07d.pdf},
year = {2007},
date = {2007-12-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {15},
number = {5},
pages = {853-866},
crossref = {(Special Issue)},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
S. S. Aphale; A. J. Fleming; S. O. R. Moheimani
High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control Journal Article
In: IET Micro & Nano Letters, vol. 2, no. 1, pp. 9–12, 2007.
@article{J07c,
title = {High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control},
author = {S. S. Aphale and A. J. Fleming and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J07c.pdf},
year = {2007},
date = {2007-12-01},
journal = {IET Micro & Nano Letters},
volume = {2},
number = {1},
pages = {9--12},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
A. J. Fleming; S. O. R. Moheimani
Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners Journal Article
In: IEEE Transactions on Control Systems Technology, vol. 14, no. 1, pp. 33–44, 2006.
@article{J06b,
title = {Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/J06b.pdf},
year = {2006},
date = {2006-12-01},
journal = {IEEE Transactions on Control Systems Technology},
volume = {14},
number = {1},
pages = {33--44},
keywords = {},
pubstate = {published},
tppubtype = {article}
}
Miscellaneous
A. J. Fleming
Charge Drive with Active DC Stabilization Miscellaneous
Patent, 2012.
@misc{P4,
title = {Charge Drive with Active DC Stabilization},
author = {A. J. Fleming},
year = {2012},
date = {2012-01-01},
volume = {PCT 2012902603},
howpublished = {Patent},
keywords = {},
pubstate = {published},
tppubtype = {misc}
}
A. J. Fleming
A Positioning System and Method Miscellaneous
Patent, 2010.
@misc{P3,
title = {A Positioning System and Method},
author = {A. J. Fleming},
year = {2010},
date = {2010-01-01},
volume = {Published Application PCT: WO 2010/04018},
howpublished = {Patent},
keywords = {},
pubstate = {published},
tppubtype = {misc}
}
Proceedings Articles
T. Sieswerda; A. J. Fleming; T. Oomen
Model-free Multi-variable Learning Control of a Five Axis Nanopositioning Stage Proceedings Article
In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, pp. 1190-1194 , Delft, Netherlands, 2021, ISBN: 978-1-6654-4140-7.
@inproceedings{C21a,
title = {Model-free Multi-variable Learning Control of a Five Axis Nanopositioning Stage},
author = {T. Sieswerda and A. J. Fleming and T. Oomen},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2022/01/C21a.pdf},
doi = {10.1109/AIM46487.2021.9517342},
isbn = {978-1-6654-4140-7},
year = {2021},
date = {2021-07-12},
urldate = {2020-07-12},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics},
pages = {1190-1194 },
address = {Delft, Netherlands},
abstract = {This article compares the performance of recently introduced learning control methods on a 5-axis nanopositioning stage. Of these methods, the Smoothed Model-Free Inversionbased Iterative Control (SMF-IIC) method requires no modeling effort for effective tracking of repetitive trajectories and is readily applicable to multi-variable systems. Experimental results show that the tracking performance of the SMF-IIC method is similar to traditional learning control methods when applied to
a single axis of the nanopositioning stage. The SMF-IIC method is also found to be effective for reference tracking of two axes simultaneously.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
This article compares the performance of recently introduced learning control methods on a 5-axis nanopositioning stage. Of these methods, the Smoothed Model-Free Inversionbased Iterative Control (SMF-IIC) method requires no modeling effort for effective tracking of repetitive trajectories and is readily applicable to multi-variable systems. Experimental results show that the tracking performance of the SMF-IIC method is similar to traditional learning control methods when applied to
a single axis of the nanopositioning stage. The SMF-IIC method is also found to be effective for reference tracking of two axes simultaneously.
a single axis of the nanopositioning stage. The SMF-IIC method is also found to be effective for reference tracking of two axes simultaneously.
M. Omidbeike; Y. K. Yong; A. J. Fleming
Sensing and Decentralized Control of a Five-Axis Monolithic Nanopositioning Stage Proceedings Article
In: IFAC World Congress, pp. 9087-9092, 2020, ISSN: 9087-9092.
@inproceedings{C20a,
title = {Sensing and Decentralized Control of a Five-Axis Monolithic Nanopositioning Stage},
author = {M. Omidbeike and Y. K. Yong and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2022/03/C20a.pdf},
doi = {10.1016/j.ifacol.2020.12.2141},
issn = {9087-9092},
year = {2020},
date = {2020-07-11},
urldate = {2020-07-11},
booktitle = {IFAC World Congress},
volume = {53},
number = {2},
pages = {9087-9092},
abstract = {This article describes the design and calibration of a five degree-of-freedom linearand angular displacement sensor utilizing piezoresistive strain gages. A simple decentralized controller is then implemented to follow linear and angular reference signals. The foremost difficulty with piezoresistive sensors is their high-temperature sensitivity. In addition, they are sensitive to motion in multiple degrees of freedom, which must be decoupled before use as a displacement sensor. A new sensing design is proposed which provides decoupled measurements of linear and angular displacements in multi-axis monolithic nanopositioning stages. The proposed method employs system identification and feedforward techniques to calibrate each axis and minimize cross-coupling. },
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
This article describes the design and calibration of a five degree-of-freedom linearand angular displacement sensor utilizing piezoresistive strain gages. A simple decentralized controller is then implemented to follow linear and angular reference signals. The foremost difficulty with piezoresistive sensors is their high-temperature sensitivity. In addition, they are sensitive to motion in multiple degrees of freedom, which must be decoupled before use as a displacement sensor. A new sensing design is proposed which provides decoupled measurements of linear and angular displacements in multi-axis monolithic nanopositioning stages. The proposed method employs system identification and feedforward techniques to calibrate each axis and minimize cross-coupling.
M. Omidbeike; A. A. Eielsen; Y. K. Yong; A. J. Fleming
Multivariable Model-less Feedforward Control of a Monolithic Nanopositioning Stage With FIR Filter Inversion Proceedings Article
In: International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), Helsinki, Finland, 2019, ISSN: 978-1-7281-0948-0.
@inproceedings{C19d,
title = {Multivariable Model-less Feedforward Control of a Monolithic Nanopositioning Stage With FIR Filter Inversion},
author = {M. Omidbeike and A. A. Eielsen and Y. K. Yong and A. J. Fleming },
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C19d.pdf},
doi = {10.1109/MARSS.2019.8860974},
issn = {978-1-7281-0948-0},
year = {2019},
date = {2019-07-02},
booktitle = {International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)},
address = {Helsinki, Finland},
abstract = {A model-less approach for inversion of the dynamics of multivariable systems using FIR filters is described. Inversion-based feedforward techniques have been widely used in the literature to achieve high-performance output tracking. The foremost difficulties associated with plant inversions are model uncertainties and non-minimum phase zeros. Various model-based methods have been proposed to exclude nonminimum phase zeros when inverting both single-input and single-output (SISO), and multiple-input and multiple-output (MIMO) systems. However, these methods increase the model uncertainty as they are no longer exact. To overcome these difficulties a model-less approach using FIR filters is presented. The results when applying the feedforward FIR filter to a multivariable nanopositioning system is presented, and they demonstrate the effectiveness of the feedforward technique in reducing the cross-coupling and achieving significantly improved output tracking.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A model-less approach for inversion of the dynamics of multivariable systems using FIR filters is described. Inversion-based feedforward techniques have been widely used in the literature to achieve high-performance output tracking. The foremost difficulties associated with plant inversions are model uncertainties and non-minimum phase zeros. Various model-based methods have been proposed to exclude nonminimum phase zeros when inverting both single-input and single-output (SISO), and multiple-input and multiple-output (MIMO) systems. However, these methods increase the model uncertainty as they are no longer exact. To overcome these difficulties a model-less approach using FIR filters is presented. The results when applying the feedforward FIR filter to a multivariable nanopositioning system is presented, and they demonstrate the effectiveness of the feedforward technique in reducing the cross-coupling and achieving significantly improved output tracking.
M. Omidbeike; Y. K. Yong; S. I. Moore; A. J. Fleming
A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet Proceedings Article
In: International Conference on Manipulation, Automation and Robotics at Small Scales , Helsinki, Finland, 2019, ISSN: 978-1-7281-0948-0.
@inproceedings{omidbeike2019axis},
title = {A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet},
author = {M. Omidbeike and Y. K. Yong and S. I. Moore and A. J. Fleming
},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C19a.pdf},
doi = {10.1109/MARSS.2019.8860940},
issn = {978-1-7281-0948-0},
year = {2019},
date = {2019-07-02},
urldate = {2019-07-02},
booktitle = {International Conference on Manipulation, Automation and Robotics at Small Scales },
journal = {Int. Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)},
address = {Helsinki, Finland},
abstract = {The paper describes design, modeling and control of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. In this design, actuators are created by removing parts of the sheet using ultrasonic machining. The constructed nanopositioner is ultra-compact with a thickness of 1 mm. It has a X and Y travel range of 15.5 µm and 13.2 µm respectively; a Z travel range of 26 µm; and a rotational motion about the X-and Y-axis of 600 µrad and 884 µrad respectively. The first resonance frequency occurs at 883 Hz in the Z-axis, and the second and third resonance frequency appears at 1850 Hz, rotating about the X-and Y-axis. A decentralized control strategy is implemented to track Z, θx and θy motions. The controller provides good tracking and significantly reduces cross-coupling motions among the three degrees-of-freedom.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
The paper describes design, modeling and control of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. In this design, actuators are created by removing parts of the sheet using ultrasonic machining. The constructed nanopositioner is ultra-compact with a thickness of 1 mm. It has a X and Y travel range of 15.5 µm and 13.2 µm respectively; a Z travel range of 26 µm; and a rotational motion about the X-and Y-axis of 600 µrad and 884 µrad respectively. The first resonance frequency occurs at 883 Hz in the Z-axis, and the second and third resonance frequency appears at 1850 Hz, rotating about the X-and Y-axis. A decentralized control strategy is implemented to track Z, θx and θy motions. The controller provides good tracking and significantly reduces cross-coupling motions among the three degrees-of-freedom.
S. Z. Mansour; R. J. Seethaler; A. J. Fleming
A Simple Asymmetric Hysteresis Model for Displacement-Force Control of Piezoelectric Actuators Proceedings Article
In: IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018.
@inproceedings{C18f,
title = {A Simple Asymmetric Hysteresis Model for Displacement-Force Control of Piezoelectric Actuators},
author = {S. Z. Mansour and R. J. Seethaler and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C18f-1.pdf},
doi = {10.1109/AIM.2018.8452221},
year = {2018},
date = {2018-07-04},
booktitle = {IEEE International Conference on Advanced Intelligent Mechatronics},
address = {Auckland, New Zealand},
abstract = {This article presents a simple hysteresis model for piezoelectric actuators that can be used for simultaneous displacement-force control applications. The presented model maps the hysteresis voltage of an actuator to the charge passing through it. It can model asymmetric hysteresis loops and does not require to be inverted for real-time implementations. The presented model consists of two exponential functions which are described by only four parameters that are identified from a single identification experiment. Another advantage of the presented model over the existing models is that, it requires measurements of current rather than charge. A simultaneously varying displacement-force experiment is created to frame the model. An average absolute error value of 8% for the hysteresis voltage-charge fit is calculated. Consequent displacement and force fits have average absolute error value of 2.5%, which are similar to the best reported in displacement-force control literature.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
This article presents a simple hysteresis model for piezoelectric actuators that can be used for simultaneous displacement-force control applications. The presented model maps the hysteresis voltage of an actuator to the charge passing through it. It can model asymmetric hysteresis loops and does not require to be inverted for real-time implementations. The presented model consists of two exponential functions which are described by only four parameters that are identified from a single identification experiment. Another advantage of the presented model over the existing models is that, it requires measurements of current rather than charge. A simultaneously varying displacement-force experiment is created to frame the model. An average absolute error value of 8% for the hysteresis voltage-charge fit is calculated. Consequent displacement and force fits have average absolute error value of 2.5%, which are similar to the best reported in displacement-force control literature.
M. Omidbeike; B. S. Routley; A. J. Fleming
Independent Estimation of Temperature and Strain in Tee-Rosette Piezoresistive Strain Sensor Proceedings Article
In: IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018.
@inproceedings{C18d,
title = {Independent Estimation of Temperature and Strain in Tee-Rosette Piezoresistive Strain Sensor},
author = {M. Omidbeike and B. S. Routley and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C18d.pdf},
doi = {10.1109/AIM.2018.8452304},
year = {2018},
date = {2018-07-04},
booktitle = {IEEE International Conference on Advanced Intelligent Mechatronics},
address = {Auckland, New Zealand},
abstract = {This article proposes a novel technique for independent measurement of strain and temperature in piezoresistive strain sensors configured in a tee-rosette. The most notable property of piezoresistive sensors is their easy integration into MEMS fabrication processes and nanopositioning systems which makes them highly advantageous for both size and cost. The foremost disadvantage associated with piezoresistive sensors is high temperature sensitivity. The proposed estimator allows independent estimation of strain and temperature, which eliminates drift due to temperature variation. Experimental results are presented for motion sensing of a piezoelectric stack actuator which shows a strain measurement with an accuracy of +/-6% over a temperature range of -15C to 40C.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
This article proposes a novel technique for independent measurement of strain and temperature in piezoresistive strain sensors configured in a tee-rosette. The most notable property of piezoresistive sensors is their easy integration into MEMS fabrication processes and nanopositioning systems which makes them highly advantageous for both size and cost. The foremost disadvantage associated with piezoresistive sensors is high temperature sensitivity. The proposed estimator allows independent estimation of strain and temperature, which eliminates drift due to temperature variation. Experimental results are presented for motion sensing of a piezoelectric stack actuator which shows a strain measurement with an accuracy of +/-6% over a temperature range of -15C to 40C.
S. I. Moore; M. Omidbeike; A. J. Fleming; Y. K. Yong
A monolithic serial-kinematic nanopositioner with integrated sensors and actuators Proceedings Article
In: IEEE International Conference on Advanced Intelligent Mechatronics, Auckland, New Zealand, 2018.
@inproceedings{C18e,
title = {A monolithic serial-kinematic nanopositioner with integrated sensors and actuators},
author = {S. I. Moore and M. Omidbeike and A. J. Fleming and Y. K. Yong},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C18e.pdf},
doi = {10.1109/AIM.2018.8452225},
year = {2018},
date = {2018-07-04},
booktitle = {IEEE International Conference on Advanced Intelligent Mechatronics},
address = {Auckland, New Zealand},
abstract = {This article describes the design, modeling and simulation of a serial-kinematic nanopositioner machined from a single sheet of piezoelectric material. In this class of nanopositioners, the flexures, sensors and actuators are completely integrated into a single monolithic structure. A non-trivial electrode topology is etched into the sheet to achieve in-plane bending and displacement of the moving platform. Finite element analysis predicts a sensitivity of 18.6 nm/V in the x-axis and 18.1 nm/V in the yaxis with a voltage limit of −250V to 1000 V. The first resonance frequency is 250 Hz in the Z axis. This design enables high-speed, long-range, lateral positioning in space-limited applications.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
This article describes the design, modeling and simulation of a serial-kinematic nanopositioner machined from a single sheet of piezoelectric material. In this class of nanopositioners, the flexures, sensors and actuators are completely integrated into a single monolithic structure. A non-trivial electrode topology is etched into the sheet to achieve in-plane bending and displacement of the moving platform. Finite element analysis predicts a sensitivity of 18.6 nm/V in the x-axis and 18.1 nm/V in the yaxis with a voltage limit of −250V to 1000 V. The first resonance frequency is 250 Hz in the Z axis. This design enables high-speed, long-range, lateral positioning in space-limited applications.
S. S. Aphale; M. Namavar; A. J. Fleming
Resonance-shifting Integral Resonant Control for High-speed Nanopositioning Proceedings Article
In: American Control Conference, Milwaukee, WI, 2018.
@inproceedings{C18a,
title = {Resonance-shifting Integral Resonant Control for High-speed Nanopositioning},
author = {S. S. Aphale and M. Namavar and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C18a.pdf},
doi = {10.23919/ACC.2018.8430900},
year = {2018},
date = {2018-06-27},
booktitle = {American Control Conference},
address = {Milwaukee, WI},
abstract = {The first resonance mode of mechanical systems is a significant limit to the achievable positioning bandwidth. This resonance is dependent on the physical, material and geometric properties of the system. Significant effort is typically required to increase the resonance frequency by increasing stiffness or reducing mass. In this article, a modified IRC scheme is presented that effectively shifts the first resonance mode to a higher frequency, thereby enabling a substantially higher positioning bandwidth. A 70% increase in positioning bandwidth is demonstrated.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
The first resonance mode of mechanical systems is a significant limit to the achievable positioning bandwidth. This resonance is dependent on the physical, material and geometric properties of the system. Significant effort is typically required to increase the resonance frequency by increasing stiffness or reducing mass. In this article, a modified IRC scheme is presented that effectively shifts the first resonance mode to a higher frequency, thereby enabling a substantially higher positioning bandwidth. A 70% increase in positioning bandwidth is demonstrated.
M. Omidbeike; Y. R. Teo; Y. K. Yong; A. J. Fleming
Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor Proceedings Article
In: IFAC World Congress, Toulouse, France, 2017.
@inproceedings{C17d,
title = {Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor},
author = {M. Omidbeike and Y. R. Teo and Y. K. Yong and A. J. Fleming},
year = {2017},
date = {2017-07-09},
booktitle = {IFAC World Congress},
address = {Toulouse, France},
abstract = {This article describes a method for tracking control of monolithic nanopositioning systems using integrated piezoelectric sensors. The monolithic nanopositioner is constructed from a single sheet of piezoelectric material where a set of flexures are used for actuation and guidance, and another set are used for position sensing. This arrangement is shown to be highly sensitive to in-plane motion (in the x- and y-axis) and insensitive to vertical motion, which is ideal for position tracking control.
The foremost difficulty with piezoelectric sensors is their low-frequency high-pass response. In this article, a simple estimator circuit is used to allow the direct application of integral tracking control. Although the system operates in open-loop at DC, dynamic command signals such as scanning trajectories are accurately tracked. Experimental results show significant improvements in linearity and positioning error. },
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
This article describes a method for tracking control of monolithic nanopositioning systems using integrated piezoelectric sensors. The monolithic nanopositioner is constructed from a single sheet of piezoelectric material where a set of flexures are used for actuation and guidance, and another set are used for position sensing. This arrangement is shown to be highly sensitive to in-plane motion (in the x- and y-axis) and insensitive to vertical motion, which is ideal for position tracking control.
The foremost difficulty with piezoelectric sensors is their low-frequency high-pass response. In this article, a simple estimator circuit is used to allow the direct application of integral tracking control. Although the system operates in open-loop at DC, dynamic command signals such as scanning trajectories are accurately tracked. Experimental results show significant improvements in linearity and positioning error.
The foremost difficulty with piezoelectric sensors is their low-frequency high-pass response. In this article, a simple estimator circuit is used to allow the direct application of integral tracking control. Although the system operates in open-loop at DC, dynamic command signals such as scanning trajectories are accurately tracked. Experimental results show significant improvements in linearity and positioning error.
M. G. Ruppert; M. Maroufi; A. Bazaei; S. O. R. Moheimani
Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner Proceedings Article
In: 20th IFAC World Congress, pp. 15554-15560, 2017.
@inproceedings{Ruppert2017b,
title = {Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner},
author = {M. G. Ruppert and M. Maroufi and A. Bazaei and S. O. R. Moheimani},
year = {2017},
date = {2017-07-01},
booktitle = {20th IFAC World Congress},
volume = {50},
number = {1},
pages = {15554-15560},
abstract = {We demonstrate a novel tracking controller formulation based on a linear time-varying
Kalman Filter to regulate amplitude and phase of a reference signal independently. The
method is applicable to sinusoidal references such as spiral, cycloid and Lissajous trajectories
which are commonly used for imaging in high-speed Atomic Force Microscopy (AFM). A
Microelectromechanical Systems (MEMS) based nanopositioner, whose fundamental resonance
frequency is dampened with an additional damping feedback loop, is employed. For a scan range
of 2um, we demonstrate experimental tracking of sinusoids with frequencies as high as 5kHz,
well beyond the open-loop fundamental resonance, with a tracking error of only 4.6nm.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
We demonstrate a novel tracking controller formulation based on a linear time-varying
Kalman Filter to regulate amplitude and phase of a reference signal independently. The
method is applicable to sinusoidal references such as spiral, cycloid and Lissajous trajectories
which are commonly used for imaging in high-speed Atomic Force Microscopy (AFM). A
Microelectromechanical Systems (MEMS) based nanopositioner, whose fundamental resonance
frequency is dampened with an additional damping feedback loop, is employed. For a scan range
of 2um, we demonstrate experimental tracking of sinusoids with frequencies as high as 5kHz,
well beyond the open-loop fundamental resonance, with a tracking error of only 4.6nm.
Kalman Filter to regulate amplitude and phase of a reference signal independently. The
method is applicable to sinusoidal references such as spiral, cycloid and Lissajous trajectories
which are commonly used for imaging in high-speed Atomic Force Microscopy (AFM). A
Microelectromechanical Systems (MEMS) based nanopositioner, whose fundamental resonance
frequency is dampened with an additional damping feedback loop, is employed. For a scan range
of 2um, we demonstrate experimental tracking of sinusoids with frequencies as high as 5kHz,
well beyond the open-loop fundamental resonance, with a tracking error of only 4.6nm.
M. Maroufi; M. G. Ruppert; A. G. Fowler; S. O. R. Moheimani
Design and Control of a Single-chip SOI-MEMS Atomic Force Microscope Proceedings Article
In: American Control Conference, 2017.
@inproceedings{Maroufi2017,
title = {Design and Control of a Single-chip SOI-MEMS Atomic Force Microscope},
author = {M. Maroufi and M. G. Ruppert and A. G. Fowler and S. O. R. Moheimani},
year = {2017},
date = {2017-05-01},
booktitle = {American Control Conference},
abstract = {This paper presents a novel microelectromechanical
systems (MEMS) implementation of an on-chip atomic
force microscope (AFM), fabricated using a silicon-on-insulator
process. The device features an XY scanner with electrostatic
actuators and electrothermal sensors, as well as an integrated
silicon microcantilever. A single AlN piezoelectric electrode is
used for simultaneous actuation and deflection sensing of the
cantilever via a charge sensing technique. With the device being
operated in closed loop, the probe scanner is successfully used to
obtain 8mmx8mm tapping-mode AFM images of a calibration
grating.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
This paper presents a novel microelectromechanical
systems (MEMS) implementation of an on-chip atomic
force microscope (AFM), fabricated using a silicon-on-insulator
process. The device features an XY scanner with electrostatic
actuators and electrothermal sensors, as well as an integrated
silicon microcantilever. A single AlN piezoelectric electrode is
used for simultaneous actuation and deflection sensing of the
cantilever via a charge sensing technique. With the device being
operated in closed loop, the probe scanner is successfully used to
obtain 8mmx8mm tapping-mode AFM images of a calibration
grating.
systems (MEMS) implementation of an on-chip atomic
force microscope (AFM), fabricated using a silicon-on-insulator
process. The device features an XY scanner with electrostatic
actuators and electrothermal sensors, as well as an integrated
silicon microcantilever. A single AlN piezoelectric electrode is
used for simultaneous actuation and deflection sensing of the
cantilever via a charge sensing technique. With the device being
operated in closed loop, the probe scanner is successfully used to
obtain 8mmx8mm tapping-mode AFM images of a calibration
grating.
S. I. Moore; Y. K. Yong; S. O. R. Moheimani
Switched Self-Sensing Actuator for a MEMS Nanopositioner Proceedings Article
In: International Conference on Mechatronics, Gippsland, Australia, 2017.
@inproceedings{Moore2017b,
title = {Switched Self-Sensing Actuator for a MEMS Nanopositioner},
author = {S. I. Moore and Y. K. Yong and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2017/03/sensor-note.pdf},
year = {2017},
date = {2017-02-15},
booktitle = {International Conference on Mechatronics},
address = {Gippsland, Australia},
abstract = {This work outlines the instrumentation and actuation of a MEMS nanopositioner, implementing a switching electronics based self-sensing actuation technique. Self-sensing actuation allows for optimal use of transducer die space in MEMS designs. The switching design accommodates actuation voltages of 50V and is compatible with the silicon-on-insulator microfabrication process. The switching electronics are designed to be directly interfaced to a digital control platform. The actuator is based on the class D amplifier and the sensor is implemented using a modulator to create a displacement-to-digital type sensor that is operated at 1MHz.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
This work outlines the instrumentation and actuation of a MEMS nanopositioner, implementing a switching electronics based self-sensing actuation technique. Self-sensing actuation allows for optimal use of transducer die space in MEMS designs. The switching design accommodates actuation voltages of 50V and is compatible with the silicon-on-insulator microfabrication process. The switching electronics are designed to be directly interfaced to a digital control platform. The actuator is based on the class D amplifier and the sensor is implemented using a modulator to create a displacement-to-digital type sensor that is operated at 1MHz.
R. de Rozario; A. J. Fleming; T. Oomen
Iterative Control for Periodic Tasks with Robustness Considerations, Applied to a Nanopositioning Stage Proceedings Article
In: IFAC Symposium on Mechatronic Systems, Loughborough, UK, 2016.
@inproceedings{C16g,
title = {Iterative Control for Periodic Tasks with Robustness Considerations, Applied to a Nanopositioning Stage},
author = {R. de Rozario and A. J. Fleming and T. Oomen},
year = {2016},
date = {2016-09-05},
booktitle = {IFAC Symposium on Mechatronic Systems},
address = {Loughborough, UK},
abstract = {Nanopositioning stages are an example of motion systems that are required to accurately perform a high frequent repetitive scanning motion. The tracking performance can be signi cantly increased by iteratively updating a feedforward input by using a nonparametric inverse plant model. However, in this paper it is shown that current approaches lack systematic robustness considerations and are su ering from limited design freedom to enforce satisfying convergence behavior. Therefore, inspired by existing the Iterative Learning Control approach, robustness is added to the existing methods to enable the desired convergence behavior. This results in the Robust Iterative Inversion-based Control method, whose potential for superior convergence is experimentally veri ed on a Nanopositioning system.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Nanopositioning stages are an example of motion systems that are required to accurately perform a high frequent repetitive scanning motion. The tracking performance can be signi cantly increased by iteratively updating a feedforward input by using a nonparametric inverse plant model. However, in this paper it is shown that current approaches lack systematic robustness considerations and are su ering from limited design freedom to enforce satisfying convergence behavior. Therefore, inspired by existing the Iterative Learning Control approach, robustness is added to the existing methods to enable the desired convergence behavior. This results in the Robust Iterative Inversion-based Control method, whose potential for superior convergence is experimentally veri ed on a Nanopositioning system.
A. J. Fleming; G. Berriman; Y. K. Yong
Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material Proceedings Article
In: IEEE Advanced Intelligent Mechatronics, Banff, Canada, 2016.
@inproceedings{C16e,
title = {Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material},
author = {A. J. Fleming and G. Berriman and Y. K. Yong},
year = {2016},
date = {2016-07-12},
booktitle = {IEEE Advanced Intelligent Mechatronics},
address = {Banff, Canada},
abstract = {This article describes the design, fabrication and testing of a new XY nanopositioning stage constructed from a single sheet of piezoelectric material. The approach involves direct ultrasonic machining of a piezoelectric sheet to create flexural and actuator features. An industrial inkjet printer is then used to create electrode features by printing Nitric Acid directly onto the evaporated metal surface of the piezo sheet. The result is a monolithic piezoelectric structure with individual electrical control over each actuator feature. Experimental results demonstrate a full-scale range of 9um in the X and Y axes, and a first resonance frequency of 230Hz in the Z axes. The completed nanopositioner is the thinnest yet reported with a thickness of only 500um. The new design method will enable a new range of ultra-compact applications in scanning probe microscopy, scanning electron microscopy, and active optics. },
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
This article describes the design, fabrication and testing of a new XY nanopositioning stage constructed from a single sheet of piezoelectric material. The approach involves direct ultrasonic machining of a piezoelectric sheet to create flexural and actuator features. An industrial inkjet printer is then used to create electrode features by printing Nitric Acid directly onto the evaporated metal surface of the piezo sheet. The result is a monolithic piezoelectric structure with individual electrical control over each actuator feature. Experimental results demonstrate a full-scale range of 9um in the X and Y axes, and a first resonance frequency of 230Hz in the Z axes. The completed nanopositioner is the thinnest yet reported with a thickness of only 500um. The new design method will enable a new range of ultra-compact applications in scanning probe microscopy, scanning electron microscopy, and active optics.
Y. R. Teo; Y. K. Yong; A. J. Fleming
A Review of Scanning Methods and Control Implications for Scanning Probe Microscopy (Invited Paper) Proceedings Article
In: American Control Conference, Boston, MA, 2016., Boston, MA, 2016.
@inproceedings{C16c,
title = {A Review of Scanning Methods and Control Implications for Scanning Probe Microscopy (Invited Paper)},
author = {Y. R. Teo and Y. K. Yong and A. J. Fleming},
year = {2016},
date = {2016-07-01},
booktitle = {American Control Conference, Boston, MA, 2016.},
address = {Boston, MA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; S. P. Wadikhaye; A. J. Fleming
High-Speed Single-Stage and Dual-Stage Mirror Scanners (Invited Paper) Proceedings Article
In: International Conference on Manipulation, Automation and Robotics at Small Scales, Paris, France, 2016.
@inproceedings{C16j,
title = {High-Speed Single-Stage and Dual-Stage Mirror Scanners (Invited Paper)},
author = {Y. K. Yong and S. P. Wadikhaye and A. J. Fleming},
year = {2016},
date = {2016-07-01},
booktitle = {International Conference on Manipulation, Automation and Robotics at Small Scales},
address = {Paris, France},
abstract = {This article presents a high-speed single-stage and dual-stage mirror scanner for applications in optical systems. Each scanner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage scanner has a displacement range of 7.6 m and a first resonance frequency of 46.8 kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage scanner has a combined travel range of approximately 10 m and a first resonance frequency of 130 kHz.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
This article presents a high-speed single-stage and dual-stage mirror scanner for applications in optical systems. Each scanner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage scanner has a displacement range of 7.6 m and a first resonance frequency of 46.8 kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage scanner has a combined travel range of approximately 10 m and a first resonance frequency of 130 kHz.
A. J. Fleming; B. S. Routley; J. L. Holdsworth
A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing Proceedings Article
In: IEEE Multi-conference on Systems and Control, Sydney, 2015.
@inproceedings{C15a,
title = {A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing},
author = {A. J. Fleming and B. S. Routley and J. L. Holdsworth},
year = {2015},
date = {2015-12-01},
booktitle = {IEEE Multi-conference on Systems and Control},
address = {Sydney},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
T. D. Godfrey; A. A. Eielsen; A. J. Fleming
Digital to Analog Converter Considerations for Achieving One Part-Per-Million in Precision Mechatronics Systems Proceedings Article
In: IEEE Multiconference on Systems and Control, Sydney, 2015.
@inproceedings{C15f,
title = {Digital to Analog Converter Considerations for Achieving One Part-Per-Million in Precision Mechatronics Systems},
author = {T. D. Godfrey and A. A. Eielsen and A. J. Fleming},
year = {2015},
date = {2015-12-01},
booktitle = {IEEE Multiconference on Systems and Control},
address = {Sydney},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. R. Teo; A. A. Eielsen; A. J. Fleming
Model-less FIR Repetitive Control with consideration of uncertainty Proceedings Article
In: IEEE Multiconference on Systems and Control, Sydney, 2015.
@inproceedings{C15c,
title = {Model-less FIR Repetitive Control with consideration of uncertainty},
author = {Y. R. Teo and A. A. Eielsen and A. J. Fleming},
year = {2015},
date = {2015-12-01},
booktitle = {IEEE Multiconference on Systems and Control},
address = {Sydney},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. Bazaei; Y. K. Yong; S. O. R. Moheimani
Internal Model Control for High-speed Spiral Scan AFM Proceedings Article
In: Australian Control Conference, Gold Coast, Australia, 2015.
@inproceedings{Bazaei2015,
title = {Internal Model Control for High-speed Spiral Scan AFM},
author = {A. Bazaei and Y. K. Yong and S. O. R. Moheimani },
year = {2015},
date = {2015-11-01},
booktitle = {Australian Control Conference, Gold Coast, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
M. Maroufi; Y. K. Yong; S. O. R. Moheimani
Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors Proceedings Article
In: IEEE Multiconference on Systems and Control, Sydney, Australia, 2015.
@inproceedings{Maroufi2015,
title = {Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors},
author = {M. Maroufi and Y. K. Yong and S. O. R. Moheimani },
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Maroufi2015.pdf},
year = {2015},
date = {2015-09-01},
booktitle = {IEEE Multiconference on Systems and Control, Sydney, Australia},
abstract = {A 2 degree of freedom microelectromechanical system (MEMS) nanopositioner is presented in this paper. The nanopositioner is fabricated using a standard silicon-on-insulator process. The device demonstrates a bidirectional displacement in two orthogonal directions. As the displacement sensing mechanism, bulk piezoresistivity of tilted clamped-guided beams is exploited. The characterization reveals more than 15 μm displacement range and an in-plane bandwidth of above 3.6 kHz in both axes. The piezoresistive sensors provide a bandwidth which is more than ten times larger than the stage's resonant frequency. To evaluate the sensor performance in closed-loop, an integral resonant controller together with an integral tracking controller are implemented where piezoresistive sensor outputs are used as measurement. The controlled nanopositioner is used for imaging in an atomic force microscope.},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A 2 degree of freedom microelectromechanical system (MEMS) nanopositioner is presented in this paper. The nanopositioner is fabricated using a standard silicon-on-insulator process. The device demonstrates a bidirectional displacement in two orthogonal directions. As the displacement sensing mechanism, bulk piezoresistivity of tilted clamped-guided beams is exploited. The characterization reveals more than 15 μm displacement range and an in-plane bandwidth of above 3.6 kHz in both axes. The piezoresistive sensors provide a bandwidth which is more than ten times larger than the stage's resonant frequency. To evaluate the sensor performance in closed-loop, an integral resonant controller together with an integral tracking controller are implemented where piezoresistive sensor outputs are used as measurement. The controlled nanopositioner is used for imaging in an atomic force microscope.
Y. K. Yong; S. O. R. Moheimani
Control of vertical axis of a video-speed AFM nanopositioner (Invited Paper) Proceedings Article
In: American Control Conference, Chicago, USA, pp. 3473-3477, 2015.
@inproceedings{Yong20153473,
title = {Control of vertical axis of a video-speed AFM nanopositioner (Invited Paper)},
author = {Y. K. Yong and S. O. R. Moheimani},
year = {2015},
date = {2015-07-01},
booktitle = {American Control Conference, Chicago, USA},
journal = {Proceedings of the American Control Conference},
volume = {2015-July},
pages = {3473-3477},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
D. Russell; A. J. Fleming; S. S. Aphale
Improving the positioning bandwidth of the Integral Resonant Control Scheme through strategic zero placement Proceedings Article
In: Proc. IFAC World Congress, Cape Town, South Africa, 2014.
@inproceedings{C14e,
title = {Improving the positioning bandwidth of the Integral Resonant Control Scheme through strategic zero placement},
author = {D. Russell and A. J. Fleming and S. S. Aphale},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/05/C14e.pdf},
year = {2014},
date = {2014-09-01},
booktitle = {Proc. IFAC World Congress},
address = {Cape Town, South Africa},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. R. Teo; D. Russell; S. S. Aphale; A. J. Fleming
Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy Proceedings Article
In: Proc. IFAC World Congress, Cape Town, South Africa, 2014.
@inproceedings{C14d,
title = {Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy},
author = {Y. R. Teo and D. Russell and S. S. Aphale and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/05/C14d.pdf},
year = {2014},
date = {2014-09-01},
booktitle = {Proc. IFAC World Congress},
address = {Cape Town, South Africa},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. R. Teo; A. A. Eielsen; J. T. Gravdahl; A. J. Fleming
Discrete-time repetitive control with model-less FIR filter inversion for high performance nanopositioning Proceedings Article
In: Proc. IEEE/ASME Advanced Intelligent Mechatronics, Besançon, France, 2014.
@inproceedings{C14f,
title = {Discrete-time repetitive control with model-less FIR filter inversion for high performance nanopositioning},
author = {Y. R. Teo and A. A. Eielsen and J. T. Gravdahl and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/05/C14f1.pdf},
year = {2014},
date = {2014-06-30},
booktitle = {Proc. IEEE/ASME Advanced Intelligent Mechatronics},
address = {Besançon, France},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. R. Teo; A. J. Fleming
Active Damping Control Using Optimal Integral Force Feedback Proceedings Article
In: Proc. American Control Conference, Portland, Oregon, 2014.
@inproceedings{C14c,
title = {Active Damping Control Using Optimal Integral Force Feedback},
author = {Y. R. Teo and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/05/C14c.pdf},
year = {2014},
date = {2014-06-02},
booktitle = {Proc. American Control Conference},
address = {Portland, Oregon},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. R. Teo; A. J. Fleming
A New Repetitive Control Scheme Based on Non-Causal FIR Filters Proceedings Article
In: Proc. American Control Conference, Portland, Oregon, 2014.
@inproceedings{C14b,
title = {A New Repetitive Control Scheme Based on Non-Causal FIR Filters},
author = {Y. R. Teo and A. J. Fleming },
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/05/C14b1.pdf},
year = {2014},
date = {2014-06-02},
booktitle = {Proc. American Control Conference},
address = {Portland, Oregon},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
D. Russell; A. J. Fleming; S. S. Aphale
Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced positioning Bandwidth of Nanopositioners Proceedings Article
In: Proc. American Control Conference, Portland, Oregon, 2014.
@inproceedings{C14a,
title = {Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced positioning Bandwidth of Nanopositioners},
author = {D. Russell and A. J. Fleming and S. S. Aphale},
url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/05/C14a1.pdf},
year = {2014},
date = {2014-06-02},
booktitle = {Proc. American Control Conference},
address = {Portland, Oregon},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. P. Wadikhaye; Y. K. Yong; S. O. R. Moheimani
Design and characterisation of a serial-kinematic nanopositioner for high-speed AFM (Invited Paper) Proceedings Article
In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France, pp. 210-215, 2014.
@inproceedings{Wadikhaye2014210,
title = {Design and characterisation of a serial-kinematic nanopositioner for high-speed AFM (Invited Paper)},
author = {S. P. Wadikhaye and Y. K. Yong and S. O. R. Moheimani},
doi = {10.1109/AIM.2014.6878080},
year = {2014},
date = {2014-01-01},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France},
journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},
pages = {210-215},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. P. Wadikhaye; Y. K. Yong; S. O. R. Moheimani
Nanopositioner design using tapered flexures: A parametric study (Invited Paper) Proceedings Article
In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, pp. 856-861, 2013.
@inproceedings{Wadikhaye2013856,
title = {Nanopositioner design using tapered flexures: A parametric study (Invited Paper)},
author = {S. P. Wadikhaye and Y. K. Yong and S. O. R. Moheimani},
doi = {10.1109/AIM.2013.6584201},
year = {2013},
date = {2013-07-01},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia},
journal = {2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics: Mechatronics for Human Wellbeing, AIM 2013},
pages = {856-861},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming
Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis Proceedings Article
In: Proc. IEEE American Control Conference, Washington, DC, 2013.
@inproceedings{C13a,
title = {Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis},
author = {A. J. Fleming},
year = {2013},
date = {2013-01-01},
booktitle = {Proc. IEEE American Control Conference},
address = {Washington, DC},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; K. K. Leang
An Experimental Comparison of PI, Inversion, and Damping Control for High Performance Nanopositioning Proceedings Article
In: Proc. IEEE American Control Conference, Washington, DC, 2013.
@inproceedings{C13b,
title = {An Experimental Comparison of PI, Inversion, and Damping Control for High Performance Nanopositioning},
author = {A. J. Fleming and K. K. Leang},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C13b.pdf},
year = {2013},
date = {2013-01-01},
booktitle = {Proc. IEEE American Control Conference},
address = {Washington, DC},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming
Position Sensor Performance in Nanometer Resolution Feedback Systems Proceedings Article
In: Proc. IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.
@inproceedings{C13c,
title = {Position Sensor Performance in Nanometer Resolution Feedback Systems},
author = {A. J. Fleming},
year = {2013},
date = {2013-01-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Hangzhou, China},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming
Time domain resolution of nanopositioning systems Proceedings Article
In: Proc. IFAC Symposium on Mechatronic Systems, Hangzhou, China, 2013.
@inproceedings{C13d,
title = {Time domain resolution of nanopositioning systems},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C13d.pdf},
year = {2013},
date = {2013-01-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Hangzhou, China},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; Y. K. Yong
Thermal Analysis of Piezoelectric Benders with Laminated Power Electronics (Invited Paper) Proceedings Article
In: Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, 2013.
@inproceedings{C13g,
title = {Thermal Analysis of Piezoelectric Benders with Laminated Power Electronics (Invited Paper)},
author = {A. J. Fleming and Y. K. Yong},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C13g.pdf},
year = {2013},
date = {2013-01-01},
booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},
address = {Wollongong, Australia},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
M. Namavar; A. J. Fleming; S. S. Aphale
Resonance-shifting Integral Resonant Control Scheme for Increasing the Positioning Bandwidth of nanopositioners Proceedings Article
In: Proc. European Control Conference, Zurich, Switzerland, 2013.
@inproceedings{C13f,
title = {Resonance-shifting Integral Resonant Control Scheme for Increasing the Positioning Bandwidth of nanopositioners},
author = {M. Namavar and A. J. Fleming and S. S. Aphale},
year = {2013},
date = {2013-01-01},
booktitle = {Proc. European Control Conference},
address = {Zurich, Switzerland},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; B. Ninness; A. G. Wills
Spectral Estimation using Dual Sensors with Uncorrelated Noise Proceedings Article
In: Proc. IEEE Sensors, Baltimore, MA, 2013.
@inproceedings{C13h,
title = {Spectral Estimation using Dual Sensors with Uncorrelated Noise},
author = {A. J. Fleming and B. Ninness and A. G. Wills},
year = {2013},
date = {2013-01-01},
booktitle = {Proc. IEEE Sensors},
address = {Baltimore, MA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. R. Teo; A. J. Fleming
Resolution of Sensors with Capacitive Source Impedance Proceedings Article
In: Proc. IEEE Sensors, Baltimore, MA, 2013.
@inproceedings{C13j,
title = {Resolution of Sensors with Capacitive Source Impedance},
author = {Y. R. Teo and A. J. Fleming},
year = {2013},
date = {2013-01-01},
booktitle = {Proc. IEEE Sensors},
address = {Baltimore, MA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; A. Bazaei; S. O. R. Moheimani
Control of a high-speed nanopositioner for Lissajous-scan video-rate AFM Proceedings Article
In: Australian Control Conference, Perth, Australia, pp. 171-176, 2013.
@inproceedings{Yong2013171,
title = {Control of a high-speed nanopositioner for Lissajous-scan video-rate AFM},
author = {Y. K. Yong and A. Bazaei and S. O. R. Moheimani},
doi = {10.1109/AUCC.2013.6697268},
year = {2013},
date = {2013-01-01},
booktitle = {Australian Control Conference, Perth, Australia},
journal = {2013 3rd Australian Control Conference, AUCC 2013},
pages = {171-176},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; A. G. Fowler; A. Mohammadi; S. O. R. Moheimani
Control of a MEMS nanopositioner for atomic force microscopy (Invited Paper) Proceedings Article
In: Proc. IFAC Symposium on Mehatronic Systems, Hangzhou, China, pp. 375-382, 2013.
@inproceedings{Yong2013375,
title = {Control of a MEMS nanopositioner for atomic force microscopy (Invited Paper)},
author = {Y. K. Yong and A. G. Fowler and A. Mohammadi and S. O. R. Moheimani},
doi = {10.3182/20130410-3-CN-2034.00038},
year = {2013},
date = {2013-01-01},
booktitle = {Proc. IFAC Symposium on Mehatronic Systems, Hangzhou, China},
journal = {IFAC Proceedings Volumes (IFAC-PapersOnline)},
pages = {375-382},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. P. Wadikhaye; B. Bhikkaji; S. O. R. Moheimani; Y. K. Yong
Analog implementation of a damping and tracking controller for a high-speed X-Y nanopositioner Proceedings Article
In: American Control Conference, Montreal, Canada, pp. 3811-3816, 2012.
@inproceedings{Wadikhaye20123811,
title = {Analog implementation of a damping and tracking controller for a high-speed X-Y nanopositioner},
author = {S. P. Wadikhaye and B. Bhikkaji and S. O. R. Moheimani and Y. K. Yong},
year = {2012},
date = {2012-06-01},
booktitle = {American Control Conference, Montreal, Canada},
journal = {Proceedings of the American Control Conference},
pages = {3811-3816},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; S. O. R. Moheimani
A Z-scanner design for high-speed scanning probe microscopy (Invited Paper) Proceedings Article
In: IEEE International Conference on Robotics and Automation, St. Paul, MN, USA, pp. 4780-4785, 2012.
@inproceedings{Yong20124780,
title = {A Z-scanner design for high-speed scanning probe microscopy (Invited Paper)},
author = {Y. K. Yong and S. O. R. Moheimani},
doi = {10.1109/ICRA.2012.6224758},
year = {2012},
date = {2012-05-01},
booktitle = {IEEE International Conference on Robotics and Automation, St. Paul, MN, USA},
journal = {Proceedings - IEEE International Conference on Robotics and Automation},
pages = {4780-4785},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming
Estimating the resolution of nanopositioning systems from frequency domain data Proceedings Article
In: Proc. IEEE International Conference on Robotics and Automation, pp. 4786-4791, St. Paul, MN, 2012.
@inproceedings{C12a,
title = {Estimating the resolution of nanopositioning systems from frequency domain data},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C12a.pdf},
year = {2012},
date = {2012-01-01},
booktitle = {Proc. IEEE International Conference on Robotics and Automation},
pages = {4786-4791},
address = {St. Paul, MN},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming
Measuring picometer nanopositioner resolution Proceedings Article
In: In Proc. Actuator, Bremen, 2012.
@inproceedings{D12a,
title = {Measuring picometer nanopositioner resolution},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/D12a.pdf},
year = {2012},
date = {2012-01-01},
booktitle = {In Proc. Actuator},
address = {Bremen},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; A. Bazaei; S. O. R. Moheimani; F. Allgower
Design and control of a novel non-raster scan pattern for fast scanning probe microscopy (Invited Paper) Proceedings Article
In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Kaohsiung, Taiwan, pp. 456-461, 2012.
@inproceedings{Yong2012456,
title = {Design and control of a novel non-raster scan pattern for fast scanning probe microscopy (Invited Paper)},
author = {Y. K. Yong and A. Bazaei and S. O. R. Moheimani and F. Allgower},
doi = {10.1109/AIM.2012.6266062},
year = {2012},
date = {2012-01-01},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Kaohsiung, Taiwan},
journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},
pages = {456-461},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. P. Wadikhaye; Y. K. Yong; S. O. R. Moheimani
A novel serial-kinematic AFM scanner: Design and characterization Proceedings Article
In: Annual Conference of the IEEE Industrial Electronics Society, Melbourne, Australia, pp. 50-55, 2011.
@inproceedings{Wadikhaye201150,
title = {A novel serial-kinematic AFM scanner: Design and characterization},
author = {S. P. Wadikhaye and Y. K. Yong and S. O. R. Moheimani},
doi = {10.1109/IECON.2011.6119287},
year = {2011},
date = {2011-11-01},
booktitle = {Annual Conference of the IEEE Industrial Electronics Society, Melbourne, Australia},
journal = {IECON Proceedings (Industrial Electronics Conference)},
pages = {50-55},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
B. Bhikkaji; Y. K. Yong; I. A. Mahmood; S. O. R. Moheimani
Multivariable control designs for piezoelectric tubes (Invited Paper) Proceedings Article
In: IFAC World Congress, Milan, Italy, pp. 2030-2035, 2011.
@inproceedings{Bhikkaji20112030,
title = {Multivariable control designs for piezoelectric tubes (Invited Paper)},
author = {B. Bhikkaji and Y. K. Yong and I. A. Mahmood and S. O. R. Moheimani},
doi = {10.3182/20110828-6-IT-1002.01745},
year = {2011},
date = {2011-08-01},
booktitle = {IFAC World Congress, Milan, Italy},
journal = {IFAC Proceedings Volumes (IFAC-PapersOnline)},
volume = {18},
pages = {2030-2035},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; B. Bhikkaji; S. O. R. Moheimani
Analog control of a high-speed atomic force microscope scanner Proceedings Article
In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary., pp. 646-651, 2011.
@inproceedings{Yong2011646,
title = {Analog control of a high-speed atomic force microscope scanner},
author = {Y. K. Yong and B. Bhikkaji and S. O. R. Moheimani},
doi = {10.1109/AIM.2011.6027103},
year = {2011},
date = {2011-07-01},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary.},
journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},
pages = {646-651},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; S. O. R. Moheimani; I. R. Petersen
A Non-raster Scan Method for High-speed SPM Proceedings Article
In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary, 2011.
@inproceedings{Yong2011,
title = {A Non-raster Scan Method for High-speed SPM},
author = {Y. K. Yong and S. O. R. Moheimani and I. R. Petersen },
year = {2011},
date = {2011-07-01},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming
A method for reducing piezoelectric non-linearity in scanning probe microscope images Proceedings Article
In: Proc. American Control Conference, pp. 2861–2866, San Francisco, CA, 2011.
@inproceedings{C11a,
title = {A method for reducing piezoelectric non-linearity in scanning probe microscope images},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C11a.pdf},
year = {2011},
date = {2011-01-01},
booktitle = {Proc. American Control Conference},
pages = {2861--2866},
address = {San Francisco, CA},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
M. Fairbairn; S. O. R. Moheimani; A. J. Fleming
Passive piezoelectric shunt control of an atomic force microscope microcantilever Proceedings Article
In: Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary, 2011.
@inproceedings{C11b,
title = {Passive piezoelectric shunt control of an atomic force microscope microcantilever},
author = {M. Fairbairn and S. O. R. Moheimani and A. J. Fleming},
year = {2011},
date = {2011-01-01},
booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},
address = {Budapest, Hungary},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; A. J. Fleming; S. O. R. Moheimani
Vibration and tracking control of a flexure-guided nanopositioner using a piezoelectric strain sensor (Invited Paper) Proceedings Article
In: Proc. International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, Changchun, China, 2011.
@inproceedings{C11c,
title = {Vibration and tracking control of a flexure-guided nanopositioner using a piezoelectric strain sensor (Invited Paper)},
author = {Y. K. Yong and A. J. Fleming and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C11c.pdf},
year = {2011},
date = {2011-01-01},
booktitle = {Proc. International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale},
address = {Changchun, China},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
M. Fairbairn; S. O. R. Moheimani; A. J. Fleming
Improving the scan rate and image quality in tapping mode atomic force microscopy with piezoelectric shunt control Proceedings Article
In: Proc. Australian Control Conference, Melbourne, Australia, 2011.
@inproceedings{C11d,
title = {Improving the scan rate and image quality in tapping mode atomic force microscopy with piezoelectric shunt control},
author = {M. Fairbairn and S. O. R. Moheimani and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C11d.pdf},
year = {2011},
date = {2011-01-01},
booktitle = {Proc. Australian Control Conference},
address = {Melbourne, Australia},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. Bazaei; Y. K. Yong; S. O. R. Moheimani; A. Sebastian
Tracking control of a novel AFM scanner using signal transformation method (Invited Paper) Proceedings Article
In: Proc. IFAC Symposium on Mechatronic System, Cambridge, MA, USA, pp. 84-89, 2010.
@inproceedings{Bazaei201084,
title = {Tracking control of a novel AFM scanner using signal transformation method (Invited Paper)},
author = {A. Bazaei and Y. K. Yong and S. O. R. Moheimani and A. Sebastian},
doi = {10.3182/20100913-3-US-2015.00021},
year = {2010},
date = {2010-09-01},
booktitle = {Proc. IFAC Symposium on Mechatronic System, Cambridge, MA, USA},
journal = {IFAC Proceedings Volumes (IFAC-PapersOnline)},
pages = {84-89},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; S. O. R. Moheimani
A compact XYZ scanner for fast atomic force microscopy in constant force contact mode Proceedings Article
In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Montreal, Canada, pp. 225-230, 2010.
@inproceedings{Yong2010225,
title = {A compact XYZ scanner for fast atomic force microscopy in constant force contact mode},
author = {Y. K. Yong and S. O. R. Moheimani},
url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Yong%202010%20-%20compact%20scanner.pdf},
doi = {10.1109/AIM.2010.5695880},
year = {2010},
date = {2010-07-01},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Montreal, Canada},
journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},
pages = {225-230},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; B. Ahmed; S. O. R. Moheimani
A 12-electrode piezoelectric tube scanner for fast atomic force microscopy (Invited Paper) Proceedings Article
In: American Control Conference, Baltimore, Maryland, USA, pp. 4957-4962, 2010.
@inproceedings{Yong20104957,
title = {A 12-electrode piezoelectric tube scanner for fast atomic force microscopy (Invited Paper)},
author = {Y. K. Yong and B. Ahmed and S. O. R. Moheimani},
year = {2010},
date = {2010-06-01},
booktitle = {American Control Conference, Baltimore, Maryland, USA},
journal = {Proceedings of the 2010 American Control Conference, ACC 2010},
pages = {4957-4962},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming
High speed nanopositioning with force feedback Proceedings Article
In: Proc. American Control Conference, pp. 4969–4974, Baltimore, MD, 2010.
@inproceedings{C10a,
title = {High speed nanopositioning with force feedback},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C10a.pdf},
year = {2010},
date = {2010-01-01},
booktitle = {Proc. American Control Conference},
pages = {4969--4974},
address = {Baltimore, MD},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming
Ultra-fast dual-stage vertical positioning for high performance SPMs Proceedings Article
In: Proc. American Control Conference, pp. 4975–4980, Baltimore, MD, 2010.
@inproceedings{C10b,
title = {Ultra-fast dual-stage vertical positioning for high performance SPMs},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C10b.pdf},
year = {2010},
date = {2010-01-01},
booktitle = {Proc. American Control Conference},
pages = {4975--4980},
address = {Baltimore, MD},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. A. Eielsen; A. J. Fleming
Passive shunt damping of a piezoelectric stack nanopositioner Proceedings Article
In: Proc. American Control Conference, pp. 4963–4968, Baltimore, MD, 2010.
@inproceedings{C10c,
title = {Passive shunt damping of a piezoelectric stack nanopositioner},
author = {A. A. Eielsen and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C10c.pdf},
year = {2010},
date = {2010-01-01},
booktitle = {Proc. American Control Conference},
pages = {4963--4968},
address = {Baltimore, MD},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. Kuiper; A. J. Fleming; G. Schitter
Dual actuation for high-speed atomic force microscopy Proceedings Article
In: Proc. IFAC Symposium on Mechatronic Systems, pp. 220–226, Boston, MA, 2010.
@inproceedings{C10d,
title = {Dual actuation for high-speed atomic force microscopy},
author = {S. Kuiper and A. J. Fleming and G. Schitter},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C10d.pdf},
year = {2010},
date = {2010-01-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
pages = {220--226},
address = {Boston, MA},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; K. K. Leang
High performance nanopositioning with integrated strain and force feedback Proceedings Article
In: Proc. IFAC Symposium on Mechatronic Systems, pp. 117–124, Boston, MA, 2010.
@inproceedings{C10e,
title = {High performance nanopositioning with integrated strain and force feedback},
author = {A. J. Fleming and K. K. Leang},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C10e.pdf},
year = {2010},
date = {2010-01-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
pages = {117--124},
address = {Boston, MA},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; T. F. Lu
Comparison of circular flexure hinge design equations and the derivation of empirical stiffness formulations Proceedings Article
In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Singapore, pp. 510-515, 2009.
@inproceedings{Yong2009510,
title = {Comparison of circular flexure hinge design equations and the derivation of empirical stiffness formulations},
author = {Y. K. Yong and T. F. Lu},
doi = {10.1109/AIM.2009.5229961},
year = {2009},
date = {2009-07-01},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Singapore},
journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},
pages = {510-515},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; S. O. R. Moheimani
Vibration control of a novel tube scanner using piezoelectric strain-induced voltage Proceedings Article
In: Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics , 2009.
@inproceedings{Yong20091070,
title = {Vibration control of a novel tube scanner using piezoelectric strain-induced voltage},
author = {Y. K. Yong and S. O. R. Moheimani},
doi = {10.1109/AIM.2009.5229728},
year = {2009},
date = {2009-07-01},
booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics },
journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; S. S. Aphale; S. O. R. Moheimani
A new robust damping and tracking controller for SPM positioning stages Proceedings Article
In: Proc. American Control Conference, St. Louis, MO, 2009.
@inproceedings{C09a,
title = {A new robust damping and tracking controller for SPM positioning stages},
author = {A. J. Fleming and S. S. Aphale and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C09a.pdf},
year = {2009},
date = {2009-01-01},
booktitle = {Proc. American Control Conference},
address = {St. Louis, MO},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming
Time-domain adaptive feed-forward control of nanopositioning systems with periodic inputs Proceedings Article
In: Proc. American Control Conference, St. Louis, MO, 2009.
@inproceedings{C09b,
title = {Time-domain adaptive feed-forward control of nanopositioning systems with periodic inputs},
author = {A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C09b.pdf},
year = {2009},
date = {2009-01-01},
booktitle = {Proc. American Control Conference},
address = {St. Louis, MO},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. O. R. Moheimani; Y. K. Yong
A new piezoelectric tube scanner for simultaneous sensing and actuation (Invited Paper) Proceedings Article
In: American Control Conference, St. Louis, Missouri, USA, pp. 2249-2253, 2009.
@inproceedings{RezaMoheimani20092249,
title = {A new piezoelectric tube scanner for simultaneous sensing and actuation (Invited Paper)},
author = {S. O. R. Moheimani and Y. K. Yong},
doi = {10.1109/ACC.2009.5160032},
year = {2009},
date = {2009-01-01},
booktitle = {American Control Conference, St. Louis, Missouri, USA},
journal = {Proceedings of the American Control Conference},
pages = {2249-2253},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; K. Liu; S. O. R. Moheimani
H∞ control for reducing cross-coupling in a compliant XY nanopositioning stage Proceedings Article
In: International Conference on Adaptive Structures and Technologies, Ascona, Switzerland., pp. 730-741, 2008.
@inproceedings{Yong2008730,
title = {H∞ control for reducing cross-coupling in a compliant XY nanopositioning stage},
author = {Y. K. Yong and K. Liu and S. O. R. Moheimani},
year = {2008},
date = {2008-10-01},
booktitle = {International Conference on Adaptive Structures and Technologies, Ascona, Switzerland.},
journal = {19th International Conference on Adaptive Structures and Technologies 2008, ICAST 2008},
pages = {730-741},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; K. K. Leang
Evaluation of charge drives for scanning probe microscope positioning stages Proceedings Article
In: Proc. American Control Conference, pp. 2028–2033, Seattle, WA, 2008.
@inproceedings{C08a,
title = {Evaluation of charge drives for scanning probe microscope positioning stages},
author = {A. J. Fleming and K. K. Leang},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C08a.pdf},
year = {2008},
date = {2008-01-01},
booktitle = {Proc. American Control Conference},
pages = {2028--2033},
address = {Seattle, WA},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
K. K. Leang; A. J. Fleming
High-speed serial-kinematic AFM scanner: Design and drive considerations Proceedings Article
In: Proc. American Control Conference, pp. 3188–3193, Seattle, WA, 2008.
@inproceedings{C08b,
title = {High-speed serial-kinematic AFM scanner: Design and drive considerations},
author = {K. K. Leang and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C08b.pdf},
year = {2008},
date = {2008-01-01},
booktitle = {Proc. American Control Conference},
pages = {3188--3193},
address = {Seattle, WA},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
J. Maess; A. J. Fleming; F. Allgöwer
Model-based vibration suppression in piezoelectric tube scanners through induced voltage feedback Proceedings Article
In: Proc. American Control Conference, pp. 2022–2027, Seattle, WA, 2008.
@inproceedings{C08c,
title = {Model-based vibration suppression in piezoelectric tube scanners through induced voltage feedback},
author = {J. Maess and A. J. Fleming and F. Allgöwer},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C08c.pdf},
year = {2008},
date = {2008-01-01},
booktitle = {Proc. American Control Conference},
pages = {2022--2027},
address = {Seattle, WA},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; A. G. Wills
Optimal input signals for bandlimited scanning systems Proceedings Article
In: Proc. IFAC World Congress, pp. 11805-11810, Seoul, Korea, 2008.
@inproceedings{C08d,
title = {Optimal input signals for bandlimited scanning systems},
author = {A. J. Fleming and A. G. Wills},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C08d.pdf},
year = {2008},
date = {2008-01-01},
booktitle = {Proc. IFAC World Congress},
pages = {11805-11810},
address = {Seoul, Korea},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. S. Aphale; A. J. Fleming; S. O. R. Moheimani
A second-order controller for resonance damping and tracking control of nanopositioning systems Proceedings Article
In: Proc. 19th International Conference on Adaptive Structures and Technologies, Ascona, Switzerland, 2008.
@inproceedings{D08b,
title = {A second-order controller for resonance damping and tracking control of nanopositioning systems},
author = {S. S. Aphale and A. J. Fleming and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/D08b.pdf},
year = {2008},
date = {2008-01-01},
booktitle = {Proc. 19th International Conference on Adaptive Structures and Technologies},
address = {Ascona, Switzerland},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; S. S. Aphale; S. O. R. Moheimani
Design, analysis and control of a fast nanopositioning stage Proceedings Article
In: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Xi'an, China, pp. 451-456, 2008, (Finalist of the Best Conference Paper Award).
@inproceedings{Yong2008451,
title = {Design, analysis and control of a fast nanopositioning stage},
author = {Y. K. Yong and S. S. Aphale and S. O. R. Moheimani},
doi = {10.1109/AIM.2008.4601703},
year = {2008},
date = {2008-01-01},
booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Xi'an, China},
journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},
pages = {451-456},
note = {Finalist of the Best Conference Paper Award},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; A. G. Wills; S. O. R. Moheimani
Sensor fusion for improved control of piezoelectric tube scanners Proceedings Article
In: Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Zurich, Switzerland, 2007.
@inproceedings{C07a,
title = {Sensor fusion for improved control of piezoelectric tube scanners},
author = {A. J. Fleming and A. G. Wills and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C07a.pdf},
year = {2007},
date = {2007-01-01},
booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},
address = {Zurich, Switzerland},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
J. Maess; A. J. Fleming; F. Allgöwer
Simulation of piezoelectric tube actuators by reduced finite element models for controller design Proceedings Article
In: Proc. American Control Conference, New York, NY, 2007.
@inproceedings{C07b,
title = {Simulation of piezoelectric tube actuators by reduced finite element models for controller design},
author = {J. Maess and A. J. Fleming and F. Allgöwer},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C07b.pdf},
year = {2007},
date = {2007-01-01},
booktitle = {Proc. American Control Conference},
address = {New York, NY},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. S. Aphale; S. O. R. Moheimani; A. J. Fleming
Dominant resonant mode damping of a piezoelectric tube nanopositioner using optimal sensorless shunts Proceedings Article
In: Proc. American Control Conference, New York, NY, 2007.
@inproceedings{C07c,
title = {Dominant resonant mode damping of a piezoelectric tube nanopositioner using optimal sensorless shunts},
author = {S. S. Aphale and S. O. R. Moheimani and A. J. Fleming},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C07c.pdf},
year = {2007},
date = {2007-01-01},
booktitle = {Proc. American Control Conference},
address = {New York, NY},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; T. F. Lu; J. Minase
Trajectory following with a three-DOF micro-motion stage Proceedings Article
In: Australasian Conference on Robotics and Automation, Auckland, New Zealand, 2006.
@inproceedings{Yong2006,
title = {Trajectory following with a three-DOF micro-motion stage},
author = {Y. K. Yong and T. F. Lu and J. Minase},
year = {2006},
date = {2006-11-01},
booktitle = {Australasian Conference on Robotics and Automation, Auckland, New Zealand},
journal = {Proceedings of the 2006 Australasian Conference on Robotics and Automation, ACRA 2006},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
G. M. Clayton; S. Tien; S. Devasia; A. J. Fleming; S. O. R. Moheimani
Hysteresis and vibration compensation in piezoelectric actuators by integrating charge control and inverse feedforward Proceedings Article
In: Proc. IFAC Symposium on Mechatronic Systems, pp. 812-818, Heidelberg, Germany, 2006.
@inproceedings{C06b,
title = {Hysteresis and vibration compensation in piezoelectric actuators by integrating charge control and inverse feedforward},
author = {G. M. Clayton and S. Tien and S. Devasia and A. J. Fleming and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C06b.pdf},
year = {2006},
date = {2006-01-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
pages = {812-818},
address = {Heidelberg, Germany},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
B. Bhikkaji; M. Ratnam; A. J. Fleming; S. O. R. Moheimani
High-performance control of a PZT Scanner Proceedings Article
In: Proc. IFAC Symposium on Mechatronic Systems, Heidelberg, Germany, 2006.
@inproceedings{C06c,
title = {High-performance control of a PZT Scanner},
author = {B. Bhikkaji and M. Ratnam and A. J. Fleming and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C06c.pdf},
year = {2006},
date = {2006-01-01},
booktitle = {Proc. IFAC Symposium on Mechatronic Systems},
address = {Heidelberg, Germany},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
S. S. Aphale; A. J. Fleming; S. O. R. Moheimani
Optimal sensorless shunts for vibration damping of a piezoelectric tube nanopositioner Proceedings Article
In: Proc. International Conference on Adaptive Structures and Technologies, Taipei, Taiwan, 2006.
@inproceedings{C06d,
title = {Optimal sensorless shunts for vibration damping of a piezoelectric tube nanopositioner},
author = {S. S. Aphale and A. J. Fleming and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C06d.pdf},
year = {2006},
date = {2006-01-01},
booktitle = {Proc. International Conference on Adaptive Structures and Technologies},
address = {Taipei, Taiwan},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
A. J. Fleming; S. O. R. Moheimani
Sensor-less vibration suppression and scan compensation for piezoelectric tube nanopositioners Proceedings Article
In: Proc. IEEE Conference on Decision and Control and European Control Conference, Seville, Spain, 2005.
@inproceedings{C05b,
title = {Sensor-less vibration suppression and scan compensation for piezoelectric tube nanopositioners},
author = {A. J. Fleming and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C05b.pdf},
year = {2005},
date = {2005-01-01},
booktitle = {Proc. IEEE Conference on Decision and Control and European Control Conference},
address = {Seville, Spain},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
M. Ratnam; B. Bhikkaji; A. J. Fleming; S. O. R. Moheimani
PPF control of a piezoelectric tube scanner Proceedings Article
In: Proc. IEEE Conference on Decision and Control and European Control Conference, Seville, Spain, 2005.
@inproceedings{C05c,
title = {PPF control of a piezoelectric tube scanner},
author = {M. Ratnam and B. Bhikkaji and A. J. Fleming and S. O. R. Moheimani},
url = {https://www.precisionmechatronicslab.com/wp-content/publications/C05c.pdf},
year = {2005},
date = {2005-01-01},
booktitle = {Proc. IEEE Conference on Decision and Control and European Control Conference},
address = {Seville, Spain},
crossref = {(Invited Session)},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; T. F. Lu; D. C. Handley; P. Hu
Kinematics of a 3RRR Compliant Micro-Motion Stage: Modelling Accuracy Improvement Proceedings Article
In: International Symposium on Precision Mechanical Measurements, Beijing, China, 2004.
@inproceedings{Yong2004,
title = {Kinematics of a 3RRR Compliant Micro-Motion Stage: Modelling Accuracy Improvement},
author = {Y. K. Yong and T. F. Lu and D. C. Handley and P. Hu },
year = {2004},
date = {2004-08-01},
booktitle = {International Symposium on Precision Mechanical Measurements, Beijing, China},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
T. F. Lu; D. C. Handley; Y. K. Yong
Position control of a 3 DOF compliant micro-motion stage Proceedings Article
In: International Conference on Control, Automation, Robotics and Vision, Kunming, China, pp. 1274-1278, 2004.
@inproceedings{Lu20041274,
title = {Position control of a 3 DOF compliant micro-motion stage},
author = {T. F. Lu and D. C. Handley and Y. K. Yong},
year = {2004},
date = {2004-01-01},
booktitle = {International Conference on Control, Automation, Robotics and Vision, Kunming, China},
journal = {8th International Conference on Control, Automation, Robotics and Vision (ICARCV)},
volume = {2},
pages = {1274-1278},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
D. C. Handley; T. F. Lu; Y. K. Yong; C. Eales
Workspace investigation of a 3 DOF compliant micro-motion stage Proceedings Article
In: International Conference on Control, Automation, Robotics and Vision, Kunming, China, pp. 1279-1284, 2004.
@inproceedings{Handley20041279,
title = {Workspace investigation of a 3 DOF compliant micro-motion stage},
author = {D. C. Handley and T. F. Lu and Y. K. Yong and C. Eales},
year = {2004},
date = {2004-01-01},
booktitle = {International Conference on Control, Automation, Robotics and Vision, Kunming, China},
journal = {2004 8th International Conference on Control, Automation, Robotics and Vision (ICARCV)},
volume = {2},
pages = {1279-1284},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Y. K. Yong; T. F. Lu; D. C. Handley
Loop closure theory in deriving linear and simple kinematic model for a 3 DOF parallel micromanipulator Proceedings Article
In: Proc. SPIE on Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, Australia, pp. 57-66, 2003.
@inproceedings{Yong200457,
title = {Loop closure theory in deriving linear and simple kinematic model for a 3 DOF parallel micromanipulator},
author = {Y. K. Yong and T. F. Lu and D. C. Handley},
doi = {10.1117/12.522258},
year = {2003},
date = {2003-12-01},
booktitle = {Proc. SPIE on Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, Australia},
journal = {Proceedings of SPIE - The International Society for Optical Engineering},
volume = {5276},
pages = {57-66},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
D. C. Handley; T. F. Lu; Y. K. Yong; W. J. Zhang
A simple and efficient dynamic modelling method for compliant micropositioning mechanisms using flexure hinges Proceedings Article
In: Proc. SPIE on Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, Australia, pp. 67-76, 2003.
@inproceedings{Handley200467,
title = {A simple and efficient dynamic modelling method for compliant micropositioning mechanisms using flexure hinges},
author = {D. C. Handley and T. F. Lu and Y. K. Yong and W. J. Zhang},
doi = {10.1117/12.523573},
year = {2003},
date = {2003-01-01},
booktitle = {Proc. SPIE on Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, Australia},
journal = {Proceedings of SPIE - The International Society for Optical Engineering},
volume = {5276},
pages = {67-76},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}
Support
Supported by the Australian Research Council, the University of Newcastle, and CDSC
[/fusion_builder_column][/fusion_builder_row][/fusion_builder_container]