Publications

@inproceedings{C21a,

title = {Model-free Multi-variable Learning Control of a Five Axis Nanopositioning Stage},

author = {T. Sieswerda and A. J. Fleming and T. Oomen},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2022/01/C21a.pdf},

doi = {10.1109/AIM46487.2021.9517342},

isbn = {978-1-6654-4140-7},

year  = {2021},

date = {2021-07-12},

urldate = {2020-07-12},

booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics},

pages = {1190-1194 },

address = {Delft, Netherlands},

abstract = {This article compares the performance of recently introduced learning control methods on a 5-axis nanopositioning stage. Of these methods, the Smoothed Model-Free Inversionbased Iterative Control (SMF-IIC) method requires no modeling effort for effective tracking of repetitive trajectories and is readily applicable to multi-variable systems. Experimental results show that the tracking performance of the SMF-IIC method is similar to traditional learning control methods when applied to

a single axis of the nanopositioning stage. The SMF-IIC method is also found to be effective for reference tracking of two axes simultaneously.},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C20a,

title = {Sensing and Decentralized Control of a Five-Axis Monolithic Nanopositioning Stage},

author = {M. Omidbeike and Y. K. Yong and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2022/03/C20a.pdf},

doi = {10.1016/j.ifacol.2020.12.2141},

issn = {9087-9092},

year  = {2020},

date = {2020-07-11},

urldate = {2020-07-11},

booktitle = {IFAC World Congress},

volume = {53},

number = {2},

pages = {9087-9092},

abstract = {This article describes the design and calibration of a five degree-of-freedom linearand  angular  displacement  sensor  utilizing  piezoresistive  strain  gages.  A  simple  decentralized controller  is  then  implemented  to  follow  linear  and  angular  reference  signals.  The  foremost difficulty with piezoresistive sensors is their high-temperature sensitivity. In addition, they are sensitive to motion in multiple degrees of freedom, which must be decoupled before use as a displacement sensor. A new sensing design is proposed which provides decoupled measurements of  linear  and  angular  displacements  in  multi-axis  monolithic  nanopositioning  stages.  The proposed method  employs  system identification  and  feedforward techniques to  calibrate each axis and minimize cross-coupling. },

keywords = {Nanopositioning, piezoelectric},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C19d,

title = {Multivariable Model-less Feedforward Control of a Monolithic Nanopositioning Stage With FIR Filter Inversion},

author = {M. Omidbeike and A. A. Eielsen and Y. K. Yong and A. J. Fleming },

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C19d.pdf},

doi = {10.1109/MARSS.2019.8860974},

issn = {978-1-7281-0948-0},

year  = {2019},

date = {2019-07-02},

booktitle = {International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)},

address = {Helsinki, Finland},

abstract = {A model-less approach for inversion of the dynamics of multivariable systems using FIR filters is described. Inversion-based feedforward techniques have been widely used in the literature to achieve high-performance output tracking. The foremost difficulties associated with plant inversions are model uncertainties and non-minimum phase zeros. Various model-based methods have been proposed to exclude nonminimum phase zeros when inverting both single-input and single-output (SISO), and multiple-input and multiple-output (MIMO) systems. However, these methods increase the model uncertainty as they are no longer exact. To overcome these difficulties a model-less approach using FIR filters is presented. The results when applying the feedforward FIR filter to a multivariable nanopositioning system is presented, and they demonstrate the effectiveness of the feedforward technique in reducing the cross-coupling and achieving significantly improved output tracking.},

keywords = {Nanopositioning, Tracking Control, Vibration Control},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{omidbeike2019axis},

title = {A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet},

author = {M. Omidbeike and Y. K. Yong and S. I. Moore and A. J. Fleming 

},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C19a.pdf},

doi = {10.1109/MARSS.2019.8860940},

issn = {978-1-7281-0948-0},

year  = {2019},

date = {2019-07-02},

urldate = {2019-07-02},

booktitle = {International Conference on Manipulation, Automation and Robotics at Small Scales },

journal = {Int. Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)},

address = {Helsinki, Finland},

abstract = {The paper describes design, modeling and control of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. In this design, actuators are created by removing parts of the sheet using ultrasonic machining. The constructed nanopositioner is ultra-compact with a thickness of 1 mm. It has a X and Y travel range of 15.5 µm and 13.2 µm respectively; a Z travel range of 26 µm; and a rotational motion about the X-and Y-axis of 600 µrad and 884 µrad respectively. The first resonance frequency occurs at 883 Hz in the Z-axis, and the second and third resonance frequency appears at 1850 Hz, rotating about the X-and Y-axis. A decentralized control strategy is implemented to track Z, θx and θy motions. The controller provides good tracking and significantly reduces cross-coupling motions among the three degrees-of-freedom.},

keywords = {Nanopositioning, Smart Structures, Tracking Control},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C18f,

title = {A Simple Asymmetric Hysteresis Model for Displacement-Force Control of Piezoelectric Actuators},

author = {S. Z. Mansour and R. J. Seethaler and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C18f-1.pdf},

doi = {10.1109/AIM.2018.8452221},

year  = {2018},

date = {2018-07-04},

booktitle = {IEEE International Conference on Advanced Intelligent Mechatronics},

address = {Auckland, New Zealand},

abstract = {This article presents a simple hysteresis model for piezoelectric actuators that can be used for simultaneous displacement-force control applications. The presented model maps the hysteresis voltage of an actuator to the charge passing through it. It can model asymmetric hysteresis loops and does not require to be inverted for real-time implementations. The presented model consists of two exponential functions which are described by only four parameters that are identified from a single identification experiment. Another advantage of the presented model over the existing models is that, it requires measurements of current rather than charge. A simultaneously varying displacement-force experiment is created to frame the model. An average absolute error value of 8% for the hysteresis voltage-charge fit is calculated. Consequent displacement and force fits have average absolute error value of 2.5%, which are similar to the best reported in displacement-force control literature.},

keywords = {Nanopositioning, Piezoelectric Transducers and Drives},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C18d,

title = {Independent Estimation of Temperature and Strain in Tee-Rosette Piezoresistive Strain Sensor},

author = {M. Omidbeike and B. S. Routley and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C18d.pdf},

doi = {10.1109/AIM.2018.8452304},

year  = {2018},

date = {2018-07-04},

booktitle = {IEEE International Conference on Advanced Intelligent Mechatronics},

address = {Auckland, New Zealand},

abstract = {This article proposes a novel technique for independent measurement of strain and temperature in piezoresistive strain sensors configured in a tee-rosette. The most notable property of piezoresistive sensors is their easy integration into MEMS fabrication processes and nanopositioning systems which makes them highly advantageous for both size and cost. The foremost disadvantage associated with piezoresistive sensors is high temperature sensitivity. The proposed estimator allows independent estimation of strain and temperature, which eliminates drift due to temperature variation. Experimental results are presented for motion sensing of a piezoelectric stack actuator which shows a strain measurement with an accuracy of +/-6% over a temperature range of -15C to 40C.},

keywords = {Nanopositioning, Piezoelectric Transducers and Drives},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C18e,

title = {A monolithic serial-kinematic nanopositioner with integrated sensors and actuators},

author = {S. I. Moore and M. Omidbeike and A. J. Fleming and Y. K. Yong},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C18e.pdf},

doi = {10.1109/AIM.2018.8452225},

year  = {2018},

date = {2018-07-04},

booktitle = {IEEE International Conference on Advanced Intelligent Mechatronics},

address = {Auckland, New Zealand},

abstract = {This article describes the design, modeling and simulation of a serial-kinematic nanopositioner machined from a single sheet of piezoelectric material. In this class of nanopositioners, the flexures, sensors and actuators are completely integrated into a single monolithic structure. A non-trivial electrode topology is etched into the sheet to achieve in-plane bending and displacement of the moving platform. Finite element analysis predicts a sensitivity of 18.6 nm/V in the x-axis and 18.1 nm/V in the yaxis with a voltage limit of −250V to 1000 V. The first resonance frequency is 250 Hz in the Z axis. This design enables high-speed, long-range, lateral positioning in space-limited applications.},

keywords = {AFM, Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C18a,

title = {Resonance-shifting Integral Resonant Control for High-speed Nanopositioning},

author = {S. S. Aphale and M. Namavar and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C18a.pdf},

doi = {10.23919/ACC.2018.8430900},

year  = {2018},

date = {2018-06-27},

booktitle = {American Control Conference},

address = {Milwaukee, WI},

abstract = {The first resonance mode of mechanical systems is a significant limit to the achievable positioning bandwidth. This resonance is dependent on the physical, material and geometric properties of the system. Significant effort is typically required to increase the resonance frequency by increasing stiffness or reducing mass. In this article, a modified IRC scheme is presented that effectively shifts the first resonance mode to a higher frequency, thereby enabling a substantially higher positioning bandwidth. A 70% increase in positioning bandwidth is demonstrated.},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C17d,

title = {Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor},

author = {M. Omidbeike and Y. R. Teo and Y. K. Yong and A. J. Fleming},

year  = {2017},

date = {2017-07-09},

booktitle = {IFAC World Congress},

address = {Toulouse, France},

abstract = {This article describes a method for tracking control of monolithic nanopositioning systems using integrated piezoelectric sensors. The monolithic nanopositioner is constructed from a single sheet of piezoelectric material where a set of flexures are used for actuation and guidance, and another set are used for position sensing. This arrangement is shown to be highly sensitive to in-plane motion (in the x- and y-axis) and insensitive to vertical motion, which is ideal for position tracking control. 



The foremost difficulty with piezoelectric sensors is their low-frequency high-pass response. In this article, a simple estimator circuit is used to allow the direct application of integral tracking control. Although the system operates in open-loop at DC, dynamic command signals such as scanning trajectories are accurately tracked. Experimental results show significant improvements in linearity and positioning error. },

keywords = {Nanopositioning, Piezoelectric Transducers and Drives},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Ruppert2017b,

title = {Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner},

author = {M. G. Ruppert and M. Maroufi and A. Bazaei and S. O. R. Moheimani},

year  = {2017},

date = {2017-07-01},

booktitle = {20th IFAC World Congress},

volume = {50},

number = {1},

pages = {15554-15560},

abstract = {We demonstrate a novel tracking controller formulation based on a linear time-varying

Kalman Filter to regulate amplitude and phase of a reference signal independently. The

method is applicable to sinusoidal references such as spiral, cycloid and Lissajous trajectories

which are commonly used for imaging in high-speed Atomic Force Microscopy (AFM). A

Microelectromechanical Systems (MEMS) based nanopositioner, whose fundamental resonance

frequency is dampened with an additional damping feedback loop, is employed. For a scan range

of 2um, we demonstrate experimental tracking of sinusoids with frequencies as high as 5kHz,

well beyond the open-loop fundamental resonance, with a tracking error of only 4.6nm.},

keywords = {MEMS, Nanopositioning, Tracking Control, Vibration Control},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Maroufi2017,

title = {Design and Control of a Single-chip SOI-MEMS Atomic Force Microscope},

author = {M. Maroufi and M. G. Ruppert and A. G. Fowler and S. O. R. Moheimani},

year  = {2017},

date = {2017-05-01},

booktitle = {American Control Conference},

abstract = {This paper presents a novel microelectromechanical

systems (MEMS) implementation of an on-chip atomic

force microscope (AFM), fabricated using a silicon-on-insulator

process. The device features an XY scanner with electrostatic

actuators and electrothermal sensors, as well as an integrated

silicon microcantilever. A single AlN piezoelectric electrode is

used for simultaneous actuation and deflection sensing of the

cantilever via a charge sensing technique. With the device being

operated in closed loop, the probe scanner is successfully used to

obtain 8mmx8mm tapping-mode AFM images of a calibration

grating.},

keywords = {MEMS, Nanopositioning, SPM, Tracking Control},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Moore2017b,

title = {Switched Self-Sensing Actuator for a MEMS Nanopositioner},

author = {S. I. Moore and Y. K. Yong and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2017/03/sensor-note.pdf},

year  = {2017},

date = {2017-02-15},

booktitle = {International Conference on Mechatronics},

address = {Gippsland, Australia},

abstract = {This work outlines the instrumentation and actuation of a MEMS nanopositioner, implementing a switching electronics based self-sensing actuation technique. Self-sensing actuation allows for optimal use of transducer die space in MEMS designs. The switching design accommodates actuation voltages of 50V and is compatible with the silicon-on-insulator microfabrication process. The switching electronics are designed to be directly interfaced to a digital control platform. The actuator is based on the class D amplifier and the sensor is implemented using a modulator to create a displacement-to-digital type sensor that is operated at 1MHz.},

keywords = {MEMS, Nanopositioning, Sensors},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C16g,

title = {Iterative Control for Periodic Tasks with Robustness Considerations, Applied to a Nanopositioning Stage},

author = {R. de Rozario and A. J. Fleming and T. Oomen},

year  = {2016},

date = {2016-09-05},

booktitle = {IFAC Symposium on Mechatronic Systems},

address = {Loughborough, UK},

abstract = {Nanopositioning stages are an example of motion systems that are required to accurately perform a high frequent repetitive scanning motion. The tracking performance can be signicantly increased by iteratively updating a feedforward input by using a nonparametric inverse plant model. However, in this paper it is shown that current approaches lack systematic robustness considerations and are suering from limited design freedom to enforce satisfying convergence behavior. Therefore, inspired by existing the Iterative Learning Control approach, robustness is added to the existing methods to enable the desired convergence behavior. This results in the Robust Iterative Inversion-based Control method, whose potential for superior convergence is experimentally veried on a Nanopositioning system.},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C16e,

title = {Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material},

author = {A. J. Fleming and G. Berriman and Y. K. Yong},

year  = {2016},

date = {2016-07-12},

booktitle = {IEEE Advanced Intelligent Mechatronics},

address = {Banff, Canada},

abstract = {This article describes the design, fabrication and testing of a new XY nanopositioning stage constructed from a single sheet of piezoelectric material. The approach involves direct ultrasonic machining of a piezoelectric sheet to create flexural and actuator features. An industrial inkjet printer is then used to create electrode features by printing Nitric Acid directly onto the evaporated metal surface of the piezo sheet. The result is a monolithic piezoelectric structure with individual electrical control over each actuator feature. Experimental results demonstrate a full-scale range of 9um in the X and Y axes, and a first resonance frequency of 230Hz in the Z axes. The completed nanopositioner is the thinnest yet reported with a thickness of only 500um. The new design method will enable a new range of ultra-compact applications in scanning probe microscopy, scanning electron microscopy, and active optics. },

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C16c,

title = {A Review of Scanning Methods and Control Implications for Scanning Probe Microscopy (Invited Paper)},

author = {Y. R. Teo and Y. K. Yong and A. J. Fleming},

year  = {2016},

date = {2016-07-01},

booktitle = {American Control Conference, Boston, MA, 2016.},

address = {Boston, MA},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C16j,

title = {High-Speed Single-Stage and Dual-Stage Mirror Scanners (Invited Paper)},

author = {Y. K. Yong and S. P. Wadikhaye and A. J. Fleming},

year  = {2016},

date = {2016-07-01},

booktitle = {International Conference on Manipulation, Automation and Robotics at Small Scales},

address = {Paris, France},

abstract = {This article presents a high-speed single-stage and dual-stage mirror scanner for applications in optical systems. Each scanner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage scanner has a displacement range of 7.6 m and a first resonance frequency of 46.8 kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage scanner has a combined travel range of approximately 10 m and a first resonance frequency of 130 kHz.},

keywords = {Nanopositioning, Optics},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C15a,

title = {A Closed-Loop Phase-Locked Interferometer for Wide Bandwidth Position Sensing},

author = {A. J. Fleming and B. S. Routley and J. L. Holdsworth},

year  = {2015},

date = {2015-12-01},

booktitle = {IEEE Multi-conference on Systems and Control},

address = {Sydney},

keywords = {Nanopositioning, Optics, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C15f,

title = {Digital to Analog Converter Considerations for Achieving One Part-Per-Million in Precision Mechatronics Systems},

author = {T. D. Godfrey and A. A. Eielsen and A. J. Fleming},

year  = {2015},

date = {2015-12-01},

booktitle = {IEEE Multiconference on Systems and Control},

address = {Sydney},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C15c,

title = {Model-less FIR Repetitive Control with consideration of uncertainty},

author = {Y. R. Teo and A. A. Eielsen and A. J. Fleming},

year  = {2015},

date = {2015-12-01},

booktitle = {IEEE Multiconference on Systems and Control},

address = {Sydney},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Bazaei2015,

title = {Internal Model Control for High-speed Spiral Scan AFM},

author = {A. Bazaei and Y. K. Yong and S. O. R. Moheimani },

year  = {2015},

date = {2015-11-01},

booktitle = {Australian Control Conference, Gold Coast, Australia},

keywords = {Nanopositioning, Scan Pattern},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Maroufi2015,

title = {Design and Control of a MEMS Nanopositioner with Bulk Piezoresistive Sensors},

author = {M. Maroufi and Y. K. Yong and S. O. R. Moheimani },

url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Maroufi2015.pdf},

year  = {2015},

date = {2015-09-01},

booktitle = {IEEE Multiconference on Systems and Control, Sydney, Australia},

abstract = {A 2 degree of freedom microelectromechanical system (MEMS) nanopositioner is presented in this paper. The nanopositioner is fabricated using a standard silicon-on-insulator process. The device demonstrates a bidirectional displacement in two orthogonal directions. As the displacement sensing mechanism, bulk piezoresistivity of tilted clamped-guided beams is exploited. The characterization reveals more than 15 μm displacement range and an in-plane bandwidth of above 3.6 kHz in both axes. The piezoresistive sensors provide a bandwidth which is more than ten times larger than the stage's resonant frequency. To evaluate the sensor performance in closed-loop, an integral resonant controller together with an integral tracking controller are implemented where piezoresistive sensor outputs are used as measurement. The controlled nanopositioner is used for imaging in an atomic force microscope.},

keywords = {MEMS, Nanopositioning, Sensors, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong20153473,

title = {Control of vertical axis of a video-speed AFM nanopositioner (Invited Paper)},

author = {Y. K. Yong and S. O. R. Moheimani},

year  = {2015},

date = {2015-07-01},

booktitle = {American Control Conference, Chicago, USA},

journal = {Proceedings of the American Control Conference},

volume = {2015-July},

pages = {3473-3477},

keywords = {MEMS, Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C14e,

title = {Improving the positioning bandwidth of the Integral Resonant Control Scheme through strategic zero placement},

author = {D. Russell and A. J. Fleming and S. S. Aphale},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/05/C14e.pdf},

year  = {2014},

date = {2014-09-01},

booktitle = {Proc. IFAC World Congress},

address = {Cape Town, South Africa},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C14d,

title = {Optimal Integral Force Feedback and Structured PI Tracking Control: Application for High Speed Confocal Microscopy},

author = {Y. R. Teo and D. Russell and S. S. Aphale and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/05/C14d.pdf},

year  = {2014},

date = {2014-09-01},

booktitle = {Proc. IFAC World Congress},

address = {Cape Town, South Africa},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C14f,

title = {Discrete-time repetitive control with model-less FIR filter inversion for high performance nanopositioning},

author = {Y. R. Teo and A. A. Eielsen and J. T. Gravdahl and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/05/C14f1.pdf},

year  = {2014},

date = {2014-06-30},

booktitle = {Proc. IEEE/ASME Advanced Intelligent Mechatronics},

address = {Besançon, France},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C14c,

title = {Active Damping Control Using Optimal Integral Force Feedback},

author = {Y. R. Teo and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/05/C14c.pdf},

year  = {2014},

date = {2014-06-02},

booktitle = {Proc. American Control Conference},

address = {Portland, Oregon},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C14b,

title = {A New Repetitive Control Scheme Based on Non-Causal FIR Filters},

author = {Y. R. Teo and A. J. Fleming },

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/05/C14b1.pdf},

year  = {2014},

date = {2014-06-02},

booktitle = {Proc. American Control Conference},

address = {Portland, Oregon},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C14a,

title = {Simultaneous Optimization of Damping and Tracking Controller Parameters via Selective Pole Placement for Enhanced positioning Bandwidth of Nanopositioners},

author = {D. Russell and A. J. Fleming and S. S. Aphale},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2015/05/C14a1.pdf},

year  = {2014},

date = {2014-06-02},

booktitle = {Proc. American Control Conference},

address = {Portland, Oregon},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Wadikhaye2014210,

title = {Design and characterisation of a serial-kinematic nanopositioner for high-speed AFM (Invited Paper)},

author = {S. P. Wadikhaye and Y. K. Yong and S. O. R. Moheimani},

doi = {10.1109/AIM.2014.6878080},

year  = {2014},

date = {2014-01-01},

booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Besancon, France},

journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},

pages = {210-215},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Wadikhaye2013856,

title = {Nanopositioner design using tapered flexures: A parametric study (Invited Paper)},

author = {S. P. Wadikhaye and Y. K. Yong and S. O. R. Moheimani},

doi = {10.1109/AIM.2013.6584201},

year  = {2013},

date = {2013-07-01},

booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia},

journal = {2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics: Mechatronics for Human Wellbeing, AIM 2013},

pages = {856-861},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C13a,

title = {Precision charge drive with low frequency voltage feedback for linearization of piezoelectric hysteresis},

author = {A. J. Fleming},

year  = {2013},

date = {2013-01-01},

booktitle = {Proc. IEEE American Control Conference},

address = {Washington, DC},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C13b,

title = {An Experimental Comparison of PI, Inversion, and Damping Control for High Performance Nanopositioning},

author = {A. J. Fleming and K. K. Leang},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C13b.pdf},

year  = {2013},

date = {2013-01-01},

booktitle = {Proc. IEEE American Control Conference},

address = {Washington, DC},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C13c,

title = {Position Sensor Performance in Nanometer Resolution Feedback Systems},

author = {A. J. Fleming},

year  = {2013},

date = {2013-01-01},

booktitle = {Proc. IFAC Symposium on Mechatronic Systems},

address = {Hangzhou, China},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C13d,

title = {Time domain resolution of nanopositioning systems},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C13d.pdf},

year  = {2013},

date = {2013-01-01},

booktitle = {Proc. IFAC Symposium on Mechatronic Systems},

address = {Hangzhou, China},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C13g,

title = {Thermal Analysis of Piezoelectric Benders with Laminated Power Electronics (Invited Paper)},

author = {A. J. Fleming and Y. K. Yong},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C13g.pdf},

year  = {2013},

date = {2013-01-01},

booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},

address = {Wollongong, Australia},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C13f,

title = {Resonance-shifting Integral Resonant Control Scheme for Increasing the Positioning Bandwidth of nanopositioners},

author = {M. Namavar and A. J. Fleming and S. S. Aphale},

year  = {2013},

date = {2013-01-01},

booktitle = {Proc. European Control Conference},

address = {Zurich, Switzerland},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C13h,

title = {Spectral Estimation using Dual Sensors with Uncorrelated Noise},

author = {A. J. Fleming and B. Ninness and A. G. Wills},

year  = {2013},

date = {2013-01-01},

booktitle = {Proc. IEEE Sensors},

address = {Baltimore, MA},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C13j,

title = {Resolution of Sensors with Capacitive Source Impedance},

author = {Y. R. Teo and A. J. Fleming},

year  = {2013},

date = {2013-01-01},

booktitle = {Proc. IEEE Sensors},

address = {Baltimore, MA},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong2013171,

title = {Control of a high-speed nanopositioner for Lissajous-scan video-rate AFM},

author = {Y. K. Yong and A. Bazaei and S. O. R. Moheimani},

doi = {10.1109/AUCC.2013.6697268},

year  = {2013},

date = {2013-01-01},

booktitle = {Australian Control Conference, Perth, Australia},

journal = {2013 3rd Australian Control Conference, AUCC 2013},

pages = {171-176},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong2013375,

title = {Control of a MEMS nanopositioner for atomic force microscopy (Invited Paper)},

author = {Y. K. Yong and A. G. Fowler and A. Mohammadi and S. O. R. Moheimani},

doi = {10.3182/20130410-3-CN-2034.00038},

year  = {2013},

date = {2013-01-01},

booktitle = {Proc. IFAC Symposium on Mehatronic Systems, Hangzhou, China},

journal = {IFAC Proceedings Volumes (IFAC-PapersOnline)},

pages = {375-382},

keywords = {MEMS, Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Wadikhaye20123811,

title = {Analog implementation of a damping and tracking controller for a high-speed X-Y nanopositioner},

author = {S. P. Wadikhaye and B. Bhikkaji and S. O. R. Moheimani and Y. K. Yong},

year  = {2012},

date = {2012-06-01},

booktitle = {American Control Conference, Montreal, Canada},

journal = {Proceedings of the American Control Conference},

pages = {3811-3816},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong20124780,

title = {A Z-scanner design for high-speed scanning probe microscopy (Invited Paper)},

author = {Y. K. Yong and S. O. R. Moheimani},

doi = {10.1109/ICRA.2012.6224758},

year  = {2012},

date = {2012-05-01},

booktitle = {IEEE International Conference on Robotics and Automation, St. Paul, MN, USA},

journal = {Proceedings - IEEE International Conference on Robotics and Automation},

pages = {4780-4785},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C12a,

title = {Estimating the resolution of nanopositioning systems from frequency domain data},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C12a.pdf},

year  = {2012},

date = {2012-01-01},

booktitle = {Proc. IEEE International Conference on Robotics and Automation},

pages = {4786-4791},

address = {St. Paul, MN},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{D12a,

title = {Measuring picometer nanopositioner resolution},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/D12a.pdf},

year  = {2012},

date = {2012-01-01},

booktitle = {In Proc. Actuator},

address = {Bremen},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong2012456,

title = {Design and control of a novel non-raster scan pattern for fast scanning probe microscopy (Invited Paper)},

author = {Y. K. Yong and A. Bazaei and S. O. R. Moheimani and F. Allgower},

doi = {10.1109/AIM.2012.6266062},

year  = {2012},

date = {2012-01-01},

booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Kaohsiung, Taiwan},

journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},

pages = {456-461},

keywords = {Nanopositioning, Scan Pattern, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Wadikhaye201150,

title = {A novel serial-kinematic AFM scanner: Design and characterization},

author = {S. P. Wadikhaye and Y. K. Yong and S. O. R. Moheimani},

doi = {10.1109/IECON.2011.6119287},

year  = {2011},

date = {2011-11-01},

booktitle = {Annual Conference of the IEEE Industrial Electronics Society, Melbourne, Australia},

journal = {IECON Proceedings (Industrial Electronics Conference)},

pages = {50-55},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Bhikkaji20112030,

title = {Multivariable control designs for piezoelectric tubes (Invited Paper)},

author = {B. Bhikkaji and Y. K. Yong and I. A. Mahmood and S. O. R. Moheimani},

doi = {10.3182/20110828-6-IT-1002.01745},

year  = {2011},

date = {2011-08-01},

booktitle = {IFAC World Congress, Milan, Italy},

journal = {IFAC Proceedings Volumes (IFAC-PapersOnline)},

volume = {18},

pages = {2030-2035},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong2011646,

title = {Analog control of a high-speed atomic force microscope scanner},

author = {Y. K. Yong and B. Bhikkaji and S. O. R. Moheimani},

doi = {10.1109/AIM.2011.6027103},

year  = {2011},

date = {2011-07-01},

booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary.},

journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},

pages = {646-651},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong2011,

title = {A Non-raster Scan Method for High-speed SPM},

author = {Y. K. Yong and S. O. R. Moheimani and I. R. Petersen },

year  = {2011},

date = {2011-07-01},

booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Budapest, Hungary},

keywords = {Nanopositioning, Scan Pattern, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C11a,

title = {A method for reducing piezoelectric non-linearity in scanning probe microscope images},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C11a.pdf},

year  = {2011},

date = {2011-01-01},

booktitle = {Proc. American Control Conference},

pages = {2861--2866},

address = {San Francisco, CA},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C11b,

title = {Passive piezoelectric shunt control of an atomic force microscope microcantilever},

author = {M. Fairbairn and S. O. R. Moheimani and A. J. Fleming},

year  = {2011},

date = {2011-01-01},

booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},

address = {Budapest, Hungary},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C11c,

title = {Vibration and tracking control of a flexure-guided nanopositioner using a piezoelectric strain sensor (Invited Paper)},

author = {Y. K. Yong and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C11c.pdf},

year  = {2011},

date = {2011-01-01},

booktitle = {Proc. International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale},

address = {Changchun, China},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C11d,

title = {Improving the scan rate and image quality in tapping mode atomic force microscopy with piezoelectric shunt control},

author = {M. Fairbairn and S. O. R. Moheimani and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C11d.pdf},

year  = {2011},

date = {2011-01-01},

booktitle = {Proc. Australian Control Conference},

address = {Melbourne, Australia},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Bazaei201084,

title = {Tracking control of a novel AFM scanner using signal transformation method (Invited Paper)},

author = {A. Bazaei and Y. K. Yong and S. O. R. Moheimani and A. Sebastian},

doi = {10.3182/20100913-3-US-2015.00021},

year  = {2010},

date = {2010-09-01},

booktitle = {Proc. IFAC Symposium on Mechatronic System, Cambridge, MA, USA},

journal = {IFAC Proceedings Volumes (IFAC-PapersOnline)},

pages = {84-89},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong2010225,

title = {A compact XYZ scanner for fast atomic force microscopy in constant force contact mode},

author = {Y. K. Yong and S. O. R. Moheimani},

url = {http://www.eng.newcastle.edu.au/~yy582/Papers/Yong%202010%20-%20compact%20scanner.pdf},

doi = {10.1109/AIM.2010.5695880},

year  = {2010},

date = {2010-07-01},

booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Montreal, Canada},

journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},

pages = {225-230},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong20104957,

title = {A 12-electrode piezoelectric tube scanner for fast atomic force microscopy (Invited Paper)},

author = {Y. K. Yong and B. Ahmed and S. O. R. Moheimani},

year  = {2010},

date = {2010-06-01},

booktitle = {American Control Conference, Baltimore, Maryland, USA},

journal = {Proceedings of the 2010 American Control Conference, ACC 2010},

pages = {4957-4962},

keywords = {Nanopositioning, Sensors, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C10a,

title = {High speed nanopositioning with force feedback},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C10a.pdf},

year  = {2010},

date = {2010-01-01},

booktitle = {Proc. American Control Conference},

pages = {4969--4974},

address = {Baltimore, MD},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C10b,

title = {Ultra-fast dual-stage vertical positioning for high performance SPMs},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C10b.pdf},

year  = {2010},

date = {2010-01-01},

booktitle = {Proc. American Control Conference},

pages = {4975--4980},

address = {Baltimore, MD},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C10c,

title = {Passive shunt damping of a piezoelectric stack nanopositioner},

author = {A. A. Eielsen and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C10c.pdf},

year  = {2010},

date = {2010-01-01},

booktitle = {Proc. American Control Conference},

pages = {4963--4968},

address = {Baltimore, MD},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C10d,

title = {Dual actuation for high-speed atomic force microscopy},

author = {S. Kuiper and A. J. Fleming and G. Schitter},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C10d.pdf},

year  = {2010},

date = {2010-01-01},

booktitle = {Proc. IFAC Symposium on Mechatronic Systems},

pages = {220--226},

address = {Boston, MA},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C10e,

title = {High performance nanopositioning with integrated strain and force feedback},

author = {A. J. Fleming and K. K. Leang},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C10e.pdf},

year  = {2010},

date = {2010-01-01},

booktitle = {Proc. IFAC Symposium on Mechatronic Systems},

pages = {117--124},

address = {Boston, MA},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong2009510,

title = {Comparison of circular flexure hinge design equations and the derivation of empirical stiffness formulations},

author = {Y. K. Yong and T. F. Lu},

doi = {10.1109/AIM.2009.5229961},

year  = {2009},

date = {2009-07-01},

booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Singapore},

journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},

pages = {510-515},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong20091070,

title = {Vibration control of a novel tube scanner using piezoelectric strain-induced voltage},

author = {Y. K. Yong and S. O. R. Moheimani},

doi = {10.1109/AIM.2009.5229728},

year  = {2009},

date = {2009-07-01},

booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics },

journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},

keywords = {Nanopositioning, Sensors, Vibration Control},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C09a,

title = {A new robust damping and tracking controller for SPM positioning stages},

author = {A. J. Fleming and S. S. Aphale and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C09a.pdf},

year  = {2009},

date = {2009-01-01},

booktitle = {Proc. American Control Conference},

address = {St. Louis, MO},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C09b,

title = {Time-domain adaptive feed-forward control of nanopositioning systems with periodic inputs},

author = {A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C09b.pdf},

year  = {2009},

date = {2009-01-01},

booktitle = {Proc. American Control Conference},

address = {St. Louis, MO},

crossref = {(Invited Session)},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{RezaMoheimani20092249,

title = {A new piezoelectric tube scanner for simultaneous sensing and actuation (Invited Paper)},

author = {S. O. R. Moheimani and Y. K. Yong},

doi = {10.1109/ACC.2009.5160032},

year  = {2009},

date = {2009-01-01},

booktitle = {American Control Conference, St. Louis, Missouri, USA},

journal = {Proceedings of the American Control Conference},

pages = {2249-2253},

keywords = {Nanopositioning, Sensors, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong2008730,

title = {H∞ control for reducing cross-coupling in a compliant XY nanopositioning stage},

author = {Y. K. Yong and K. Liu and S. O. R. Moheimani},

year  = {2008},

date = {2008-10-01},

booktitle = {International Conference on Adaptive Structures and Technologies, Ascona, Switzerland.},

journal = {19th International Conference on Adaptive Structures and Technologies 2008, ICAST 2008},

pages = {730-741},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C08a,

title = {Evaluation of charge drives for scanning probe microscope positioning stages},

author = {A. J. Fleming and K. K. Leang},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C08a.pdf},

year  = {2008},

date = {2008-01-01},

booktitle = {Proc. American Control Conference},

pages = {2028--2033},

address = {Seattle, WA},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C08b,

title = {High-speed serial-kinematic AFM scanner: Design and drive considerations},

author = {K. K. Leang and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C08b.pdf},

year  = {2008},

date = {2008-01-01},

booktitle = {Proc. American Control Conference},

pages = {3188--3193},

address = {Seattle, WA},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C08c,

title = {Model-based vibration suppression in piezoelectric tube scanners through induced voltage feedback},

author = {J. Maess and A. J. Fleming and F. Allgöwer},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C08c.pdf},

year  = {2008},

date = {2008-01-01},

booktitle = {Proc. American Control Conference},

pages = {2022--2027},

address = {Seattle, WA},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C08d,

title = {Optimal input signals for bandlimited scanning systems},

author = {A. J. Fleming and A. G. Wills},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C08d.pdf},

year  = {2008},

date = {2008-01-01},

booktitle = {Proc. IFAC World Congress},

pages = {11805-11810},

address = {Seoul, Korea},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{D08b,

title = {A second-order controller for resonance damping and tracking control of nanopositioning systems},

author = {S. S. Aphale and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/D08b.pdf},

year  = {2008},

date = {2008-01-01},

booktitle = {Proc. 19th International Conference on Adaptive Structures and Technologies},

address = {Ascona, Switzerland},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong2008451,

title = {Design, analysis and control of a fast nanopositioning stage},

author = {Y. K. Yong and S. S. Aphale and S. O. R. Moheimani},

doi = {10.1109/AIM.2008.4601703},

year  = {2008},

date = {2008-01-01},

booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Xi'an, China},

journal = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM},

pages = {451-456},

note = {Finalist of the Best Conference Paper Award},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C07a,

title = {Sensor fusion for improved control of piezoelectric tube scanners},

author = {A. J. Fleming and A. G. Wills and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C07a.pdf},

year  = {2007},

date = {2007-01-01},

booktitle = {Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics},

address = {Zurich, Switzerland},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C07b,

title = {Simulation of piezoelectric tube actuators by reduced finite element models for controller design},

author = {J. Maess and A. J. Fleming and F. Allgöwer},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C07b.pdf},

year  = {2007},

date = {2007-01-01},

booktitle = {Proc. American Control Conference},

address = {New York, NY},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C07c,

title = {Dominant resonant mode damping of a piezoelectric tube nanopositioner using optimal sensorless shunts},

author = {S. S. Aphale and S. O. R. Moheimani and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C07c.pdf},

year  = {2007},

date = {2007-01-01},

booktitle = {Proc. American Control Conference},

address = {New York, NY},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong2006,

title = {Trajectory following with a three-DOF micro-motion stage},

author = {Y. K. Yong and T. F. Lu and J. Minase},

year  = {2006},

date = {2006-11-01},

booktitle = {Australasian Conference on Robotics and Automation, Auckland, New Zealand},

journal = {Proceedings of the 2006 Australasian Conference on Robotics and Automation, ACRA 2006},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C06b,

title = {Hysteresis and vibration compensation in piezoelectric actuators by integrating charge control and inverse feedforward},

author = {G. M. Clayton and S. Tien and S. Devasia and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C06b.pdf},

year  = {2006},

date = {2006-01-01},

booktitle = {Proc. IFAC Symposium on Mechatronic Systems},

pages = {812-818},

address = {Heidelberg, Germany},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C06c,

title = {High-performance control of a PZT Scanner},

author = {B. Bhikkaji and M. Ratnam and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C06c.pdf},

year  = {2006},

date = {2006-01-01},

booktitle = {Proc. IFAC Symposium on Mechatronic Systems},

address = {Heidelberg, Germany},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C06d,

title = {Optimal sensorless shunts for vibration damping of a piezoelectric tube nanopositioner},

author = {S. S. Aphale and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C06d.pdf},

year  = {2006},

date = {2006-01-01},

booktitle = {Proc. International Conference on Adaptive Structures and Technologies},

address = {Taipei, Taiwan},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C05b,

title = {Sensor-less vibration suppression and scan compensation for piezoelectric tube nanopositioners},

author = {A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C05b.pdf},

year  = {2005},

date = {2005-01-01},

booktitle = {Proc. IEEE Conference on Decision and Control and European Control Conference},

address = {Seville, Spain},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C05c,

title = {PPF control of a piezoelectric tube scanner},

author = {M. Ratnam and B. Bhikkaji and A. J. Fleming and S. O. R. Moheimani},

url = {https://www.precisionmechatronicslab.com/wp-content/publications/C05c.pdf},

year  = {2005},

date = {2005-01-01},

booktitle = {Proc. IEEE Conference on Decision and Control and European Control Conference},

address = {Seville, Spain},

crossref = {(Invited Session)},

keywords = {Nanopositioning, SPM},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong2004,

title = {Kinematics of a 3RRR Compliant Micro-Motion Stage: Modelling Accuracy Improvement},

author = {Y. K. Yong and T. F. Lu and D. C. Handley and P. Hu },

year  = {2004},

date = {2004-08-01},

booktitle = {International Symposium on Precision Mechanical Measurements, Beijing, China},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Lu20041274,

title = {Position control of a 3 DOF compliant micro-motion stage},

author = {T. F. Lu and D. C. Handley and Y. K. Yong},

year  = {2004},

date = {2004-01-01},

booktitle = {International Conference on Control, Automation, Robotics and Vision, Kunming, China},

journal = {8th International Conference on Control, Automation, Robotics and Vision (ICARCV)},

volume = {2},

pages = {1274-1278},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Handley20041279,

title = {Workspace investigation of a 3 DOF compliant micro-motion stage},

author = {D. C. Handley and T. F. Lu and Y. K. Yong and C. Eales},

year  = {2004},

date = {2004-01-01},

booktitle = {International Conference on Control, Automation, Robotics and Vision, Kunming, China},

journal = {2004 8th International Conference on Control, Automation, Robotics and Vision (ICARCV)},

volume = {2},

pages = {1279-1284},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Yong200457,

title = {Loop closure theory in deriving linear and simple kinematic model for a 3 DOF parallel micromanipulator},

author = {Y. K. Yong and T. F. Lu and D. C. Handley},

doi = {10.1117/12.522258},

year  = {2003},

date = {2003-12-01},

booktitle = {Proc. SPIE on Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, Australia},

journal = {Proceedings of SPIE - The International Society for Optical Engineering},

volume = {5276},

pages = {57-66},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{Handley200467,

title = {A simple and efficient dynamic modelling method for compliant micropositioning mechanisms using flexure hinges},

author = {D. C. Handley and T. F. Lu and Y. K. Yong and W. J. Zhang},

doi = {10.1117/12.523573},

year  = {2003},

date = {2003-01-01},

booktitle = {Proc. SPIE on Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, Australia},

journal = {Proceedings of SPIE - The International Society for Optical Engineering},

volume = {5276},

pages = {67-76},

keywords = {Nanopositioning},

pubstate = {published},

tppubtype = {inproceedings}

}