@inproceedings{C20a,

title = {Sensing and Decentralized Control of a Five-Axis Monolithic Nanopositioning Stage},

author = {M. Omidbeike and Y. K. Yong and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2022/03/C20a.pdf},

doi = {10.1016/j.ifacol.2020.12.2141},

issn = {9087-9092},

year  = {2020},

date = {2020-07-11},

urldate = {2020-07-11},

booktitle = {IFAC World Congress},

volume = {53},

number = {2},

pages = {9087-9092},

abstract = {This article describes the design and calibration of a five degree-of-freedom linearand  angular  displacement  sensor  utilizing  piezoresistive  strain  gages.  A  simple  decentralized controller  is  then  implemented  to  follow  linear  and  angular  reference  signals.  The  foremost difficulty with piezoresistive sensors is their high-temperature sensitivity. In addition, they are sensitive to motion in multiple degrees of freedom, which must be decoupled before use as a displacement sensor. A new sensing design is proposed which provides decoupled measurements of  linear  and  angular  displacements  in  multi-axis  monolithic  nanopositioning  stages.  The proposed method  employs  system identification  and  feedforward techniques to  calibrate each axis and minimize cross-coupling. },

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C19d,

title = {Multivariable Model-less Feedforward Control of a Monolithic Nanopositioning Stage With FIR Filter Inversion},

author = {M. Omidbeike and A. A. Eielsen and Y. K. Yong and A. J. Fleming },

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C19d.pdf},

doi = {10.1109/MARSS.2019.8860974},

issn = {978-1-7281-0948-0},

year  = {2019},

date = {2019-07-02},

booktitle = {International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)},

address = {Helsinki, Finland},

abstract = {A model-less approach for inversion of the dynamics of multivariable systems using FIR filters is described. Inversion-based feedforward techniques have been widely used in the literature to achieve high-performance output tracking. The foremost difficulties associated with plant inversions are model uncertainties and non-minimum phase zeros. Various model-based methods have been proposed to exclude nonminimum phase zeros when inverting both single-input and single-output (SISO), and multiple-input and multiple-output (MIMO) systems. However, these methods increase the model uncertainty as they are no longer exact. To overcome these difficulties a model-less approach using FIR filters is presented. The results when applying the feedforward FIR filter to a multivariable nanopositioning system is presented, and they demonstrate the effectiveness of the feedforward technique in reducing the cross-coupling and achieving significantly improved output tracking.},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{omidbeike2019axis},

title = {A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet},

author = {M. Omidbeike and Y. K. Yong and S. I. Moore and A. J. Fleming 

},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C19a.pdf},

doi = {10.1109/MARSS.2019.8860940},

issn = {978-1-7281-0948-0},

year  = {2019},

date = {2019-07-02},

urldate = {2019-07-02},

booktitle = {International Conference on Manipulation, Automation and Robotics at Small Scales },

journal = {Int. Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)},

address = {Helsinki, Finland},

abstract = {The paper describes design, modeling and control of a five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet. In this design, actuators are created by removing parts of the sheet using ultrasonic machining. The constructed nanopositioner is ultra-compact with a thickness of 1 mm. It has a X and Y travel range of 15.5 µm and 13.2 µm respectively; a Z travel range of 26 µm; and a rotational motion about the X-and Y-axis of 600 µrad and 884 µrad respectively. The first resonance frequency occurs at 883 Hz in the Z-axis, and the second and third resonance frequency appears at 1850 Hz, rotating about the X-and Y-axis. A decentralized control strategy is implemented to track Z, θx and θy motions. The controller provides good tracking and significantly reduces cross-coupling motions among the three degrees-of-freedom.},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C18d,

title = {Independent Estimation of Temperature and Strain in Tee-Rosette Piezoresistive Strain Sensor},

author = {M. Omidbeike and B. S. Routley and A. J. Fleming},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C18d.pdf},

doi = {10.1109/AIM.2018.8452304},

year  = {2018},

date = {2018-07-04},

booktitle = {IEEE International Conference on Advanced Intelligent Mechatronics},

address = {Auckland, New Zealand},

abstract = {This article proposes a novel technique for independent measurement of strain and temperature in piezoresistive strain sensors configured in a tee-rosette. The most notable property of piezoresistive sensors is their easy integration into MEMS fabrication processes and nanopositioning systems which makes them highly advantageous for both size and cost. The foremost disadvantage associated with piezoresistive sensors is high temperature sensitivity. The proposed estimator allows independent estimation of strain and temperature, which eliminates drift due to temperature variation. Experimental results are presented for motion sensing of a piezoelectric stack actuator which shows a strain measurement with an accuracy of +/-6% over a temperature range of -15C to 40C.},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C18e,

title = {A monolithic serial-kinematic nanopositioner with integrated sensors and actuators},

author = {S. I. Moore and M. Omidbeike and A. J. Fleming and Y. K. Yong},

url = {https://www.precisionmechatronicslab.com/wp-content/uploads/2021/02/C18e.pdf},

doi = {10.1109/AIM.2018.8452225},

year  = {2018},

date = {2018-07-04},

booktitle = {IEEE International Conference on Advanced Intelligent Mechatronics},

address = {Auckland, New Zealand},

abstract = {This article describes the design, modeling and simulation of a serial-kinematic nanopositioner machined from a single sheet of piezoelectric material. In this class of nanopositioners, the flexures, sensors and actuators are completely integrated into a single monolithic structure. A non-trivial electrode topology is etched into the sheet to achieve in-plane bending and displacement of the moving platform. Finite element analysis predicts a sensitivity of 18.6 nm/V in the x-axis and 18.1 nm/V in the yaxis with a voltage limit of −250V to 1000 V. The first resonance frequency is 250 Hz in the Z axis. This design enables high-speed, long-range, lateral positioning in space-limited applications.},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{C17d,

title = {Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor},

author = {M. Omidbeike and Y. R. Teo and Y. K. Yong and A. J. Fleming},

year  = {2017},

date = {2017-07-09},

booktitle = {IFAC World Congress},

address = {Toulouse, France},

abstract = {This article describes a method for tracking control of monolithic nanopositioning systems using integrated piezoelectric sensors. The monolithic nanopositioner is constructed from a single sheet of piezoelectric material where a set of flexures are used for actuation and guidance, and another set are used for position sensing. This arrangement is shown to be highly sensitive to in-plane motion (in the x- and y-axis) and insensitive to vertical motion, which is ideal for position tracking control. 



The foremost difficulty with piezoelectric sensors is their low-frequency high-pass response. In this article, a simple estimator circuit is used to allow the direct application of integral tracking control. Although the system operates in open-loop at DC, dynamic command signals such as scanning trajectories are accurately tracked. Experimental results show significant improvements in linearity and positioning error. },

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}